Design Of Integrated Systems Including Mems And Asics

Abstract

MicroElectroMechanical Systems (MEMS) is a new field whlch encompasses the fabrication of devices containing moving parts or fluids using fabrication techniques derived from the IC industry. In some areas and contexts (principally in Europe) the field is called Micro Systems Technology (MST). These devices and systems are: 0 Micron to mm scale devices having moving parts or fluids. 0 Batch fabricated by methods related or derived from the IC industry. 0 Sensors or Actuators or Transducers from one type of physics to another, 0 Controlled or integrated with on-chip or off chip ASICs MEMS design involves several layers of design work, and potentially concurrent engineering among several groups. An "Actor" based view of such conwent engineering is sketched in Figure 1.