Electroquasistatic induction micromotors

IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' Pub Date : 1989-02-20 DOI:10.1109/MEMSYS.1989.77951

S. Bart, J. Lang

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引用次数: 19

Abstract

The steady-state operation of the electroquasistatic induction micromotor (IM) is investigated. A rotary pancake IM compatible with surface micromachining serves as an example. A model is developed to predict the electric potential, field, and free charge within the IM. The model also predicts the motive torque and transverse force of electric origin acting on its rotor. The torque is balanced against bushing friction and windage to determine rotor velocity; the bushing friction is modeled as a function of the transverse force acting on the rotor. The model is used to study IM performance and its dependence on IM dimensions and material properties. For example, IM performance is predicted to be a complex function of axial IM dimensions and a strong function of rotor conductivity. The study also reveals that IM performance can differ significantly from that of the variable-capacitance micromotor. For example, the dependence of motive torque and transverse force on velocity and the excitation and control requirements can all be significantly different.<>

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准静电感应微型电动机

研究了准静电感应微电机的稳态运行。以一种与表面微加工兼容的旋转煎饼IM为例。建立了一个模型来预测电势、电场和内部的自由电荷。该模型还预测了作用在转子上的电机转矩和横向力。转矩与衬套摩擦和风量相平衡，确定转子速度;衬套摩擦被建模为作用在转子上的横向力的函数。该模型用于研究IM性能及其对IM尺寸和材料性能的依赖关系。例如，预测IM性能是轴向IM尺寸的复杂函数和转子电导率的强烈函数。研究还表明，IM的性能与变电容微电机的性能存在显著差异。例如，动力转矩和横向力对速度的依赖关系以及激励和控制要求都可能有很大不同。

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IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'

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