Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77966
L. Chen, Z.L. Zhang, J. J. Yao, D. C. Thomas, N. MacDonald
A selective chemical vapor deposition (CVD) tungsten process is used to fabricate three-dimensional tungsten cantilever beams on a silicon substrate. Two beams form micromechanical tweezers that move in three dimensions by the application of potential differences between the beams, and between the beams and the silicon substrate. A high-deposition-rate selective tungsten CVD process is used to fabricate beams of greater than three microns thickness in patterned CVD SiO/sub 2/ trenches ion-implanted with silicon. Tweezer 200- mu m in length with a cross section of 2.7 mu m*2.5 mu m close with an applied voltage of less than 150 V. The magnitude of the deflection and the beam profile are compared to results obtained using simulations of the electric field and dynamic mechanical simulations of the tweezers.<>
{"title":"Selective chemical vapor deposition of tungsten for microdynamic structures","authors":"L. Chen, Z.L. Zhang, J. J. Yao, D. C. Thomas, N. MacDonald","doi":"10.1109/MEMSYS.1989.77966","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77966","url":null,"abstract":"A selective chemical vapor deposition (CVD) tungsten process is used to fabricate three-dimensional tungsten cantilever beams on a silicon substrate. Two beams form micromechanical tweezers that move in three dimensions by the application of potential differences between the beams, and between the beams and the silicon substrate. A high-deposition-rate selective tungsten CVD process is used to fabricate beams of greater than three microns thickness in patterned CVD SiO/sub 2/ trenches ion-implanted with silicon. Tweezer 200- mu m in length with a cross section of 2.7 mu m*2.5 mu m close with an applied voltage of less than 150 V. The magnitude of the deflection and the beam profile are compared to results obtained using simulations of the electric field and dynamic mechanical simulations of the tweezers.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115604733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77959
A. Pisano
Resonant-structure micromotors operate on the principle of mechanical resonance, so that the armature is driven for maximum displacement and power. The application of resonance in motors is placed in historical perspective and the scaling issues for such resonant systems are identified and quantified. Along with a conventional, tensile-element resonant-structure, an novel, crab-leg flexure system is described, and the stress and flexural spring constant formulas are derived.<>
{"title":"Resonant-structure micromotors","authors":"A. Pisano","doi":"10.1109/MEMSYS.1989.77959","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77959","url":null,"abstract":"Resonant-structure micromotors operate on the principle of mechanical resonance, so that the armature is driven for maximum displacement and power. The application of resonance in motors is placed in historical perspective and the scaling issues for such resonant systems are identified and quantified. Along with a conventional, tensile-element resonant-structure, an novel, crab-leg flexure system is described, and the stress and flexural spring constant formulas are derived.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125339515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77962
M. W. Putty, S. Chang, R. Howe, A. Robinson, K. D. Wise
Theoretical and experimental characteristics of a two-terminal, or one-port, resonant microstructure are discussed. An equivalent circuit model that is useful for design and analysis of these devices is presented. This model is verified by experimental measurements, with a worst-case error between model and experimental parameters of 30%. A process for integrating polysilicon resonant microstructures with on-chip NMOS (N-metal oxide semiconductor) circuitry is also described. A novel feature of this process is the use of rapid thermal annealing (RTA) for strain-relief of the non-implanted phosphorus-doped polysilicon. The RTA-strain-relieved polysilicon has a Young's modulus of 0.9.10/sup 12/ dynes/cm/sup 2/ and residual strain of 0.002% as measured by resonant frequency techniques. This low value of strain indicated that RTA is a useful strain-relief technique.<>
{"title":"One-port active polysilicon resonant microstructures","authors":"M. W. Putty, S. Chang, R. Howe, A. Robinson, K. D. Wise","doi":"10.1109/MEMSYS.1989.77962","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77962","url":null,"abstract":"Theoretical and experimental characteristics of a two-terminal, or one-port, resonant microstructure are discussed. An equivalent circuit model that is useful for design and analysis of these devices is presented. This model is verified by experimental measurements, with a worst-case error between model and experimental parameters of 30%. A process for integrating polysilicon resonant microstructures with on-chip NMOS (N-metal oxide semiconductor) circuitry is also described. A novel feature of this process is the use of rapid thermal annealing (RTA) for strain-relief of the non-implanted phosphorus-doped polysilicon. The RTA-strain-relieved polysilicon has a Young's modulus of 0.9.10/sup 12/ dynes/cm/sup 2/ and residual strain of 0.002% as measured by resonant frequency techniques. This low value of strain indicated that RTA is a useful strain-relief technique.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122103851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77965
M. Allen, Martin Scheidl, R.L. Smith
A process for fabricating silicon plates of varying thicknesses suspended by thin, flexible polyimide arms has been developed. The process uses bulk micromachining techniques and consists of four steps: a diaphragm etch from the back of the wafer; a trench etch from the front side (to define the plates); deposition and patterning of the plate support beams; and a self-aligned backside plasma etch to release the plates. The authors have used this process to fabricate square silicon plates two millimeters on a side and 7-10- mu m-thick suspended by polyimide beams 500- mu m long, 4- mu m thick, and 100-200- mu m wide. By evaporating aluminum on the topside of the plates, it was possible to deflect them electrostatically approximately 60 mu m at 40 V applied voltage. These structures were designed for application as micromachined mirrors, although their sensitivity to motion and electrical and thermal isolation suggest other potential applications such as gas sensors, flow sensors, and accelerometers.<>
{"title":"Design and fabrication of movable silicon plates suspended by flexible supports","authors":"M. Allen, Martin Scheidl, R.L. Smith","doi":"10.1109/MEMSYS.1989.77965","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77965","url":null,"abstract":"A process for fabricating silicon plates of varying thicknesses suspended by thin, flexible polyimide arms has been developed. The process uses bulk micromachining techniques and consists of four steps: a diaphragm etch from the back of the wafer; a trench etch from the front side (to define the plates); deposition and patterning of the plate support beams; and a self-aligned backside plasma etch to release the plates. The authors have used this process to fabricate square silicon plates two millimeters on a side and 7-10- mu m-thick suspended by polyimide beams 500- mu m long, 4- mu m thick, and 100-200- mu m wide. By evaporating aluminum on the topside of the plates, it was possible to deflect them electrostatically approximately 60 mu m at 40 V applied voltage. These structures were designed for application as micromachined mirrors, although their sensitivity to motion and electrical and thermal isolation suggest other potential applications such as gas sensors, flow sensors, and accelerometers.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131083487","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77951
S. Bart, J. Lang
The steady-state operation of the electroquasistatic induction micromotor (IM) is investigated. A rotary pancake IM compatible with surface micromachining serves as an example. A model is developed to predict the electric potential, field, and free charge within the IM. The model also predicts the motive torque and transverse force of electric origin acting on its rotor. The torque is balanced against bushing friction and windage to determine rotor velocity; the bushing friction is modeled as a function of the transverse force acting on the rotor. The model is used to study IM performance and its dependence on IM dimensions and material properties. For example, IM performance is predicted to be a complex function of axial IM dimensions and a strong function of rotor conductivity. The study also reveals that IM performance can differ significantly from that of the variable-capacitance micromotor. For example, the dependence of motive torque and transverse force on velocity and the excitation and control requirements can all be significantly different.<>
{"title":"Electroquasistatic induction micromotors","authors":"S. Bart, J. Lang","doi":"10.1109/MEMSYS.1989.77951","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77951","url":null,"abstract":"The steady-state operation of the electroquasistatic induction micromotor (IM) is investigated. A rotary pancake IM compatible with surface micromachining serves as an example. A model is developed to predict the electric potential, field, and free charge within the IM. The model also predicts the motive torque and transverse force of electric origin acting on its rotor. The torque is balanced against bushing friction and windage to determine rotor velocity; the bushing friction is modeled as a function of the transverse force acting on the rotor. The model is used to study IM performance and its dependence on IM dimensions and material properties. For example, IM performance is predicted to be a complex function of axial IM dimensions and a strong function of rotor conductivity. The study also reveals that IM performance can differ significantly from that of the variable-capacitance micromotor. For example, the dependence of motive torque and transverse force on velocity and the excitation and control requirements can all be significantly different.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115118604","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77980
M. Sakata
The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered.<>
{"title":"An electrostatic microactuator for electro-mechanical relay","authors":"M. Sakata","doi":"10.1109/MEMSYS.1989.77980","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77980","url":null,"abstract":"The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"972 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123315025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77979
N. Nakajima, K. Ogawa, I. Fujimasa
The authors present micro-Stirling engines as a new potential field of micromachine study. The micro-Stirling engine is defined as a miniature Stirling engine, smaller than a few cubic centimeters. The purpose of this study is to establish the design concept and to realize a microactuator and a microheatpump. By applying dimensional analysis and computer simulation, the authors investigated how design parameters change when the engine size becomes smaller. A micro-Stirling engine of about 0.05 cm/sup 3/ in a piston swept volume was realized. The output power is about 10 mW for 10 Hz vibration. Problems of miniaturizing the engines to the size of a few cubic millimeters are discussed.<>
{"title":"Study on micro engines-miniaturizing Stirling engines for actuators and heatpumps","authors":"N. Nakajima, K. Ogawa, I. Fujimasa","doi":"10.1109/MEMSYS.1989.77979","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77979","url":null,"abstract":"The authors present micro-Stirling engines as a new potential field of micromachine study. The micro-Stirling engine is defined as a miniature Stirling engine, smaller than a few cubic centimeters. The purpose of this study is to establish the design concept and to realize a microactuator and a microheatpump. By applying dimensional analysis and computer simulation, the authors investigated how design parameters change when the engine size becomes smaller. A micro-Stirling engine of about 0.05 cm/sup 3/ in a piston swept volume was realized. The output power is about 10 mW for 10 Hz vibration. Problems of miniaturizing the engines to the size of a few cubic millimeters are discussed.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129320924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77960
R. Brockett
The author establishes a theoretical framework for analyzing and classifying actuators which generate their output by rectifying small-amplitude mechanical vibrations such as might be generated by piezoelectric elements. These ideas are of interest when designing for microfabrication because motors based on these principles: (1) can generate translational output directly without use of rotary bearings; (2) appear to be scalable over several orders of magnitude of the length scale; and (3) appear to be capable of generating mechanical power proportional to driving frequency over several orders of magnitude of frequency. Achieving this performance is dependent on being able to fabricate features, or at least control surface irregularities, on the scale v/w where v is the velocity of the actuator and w is the operating frequency.<>
{"title":"On the rectification of vibratory motion","authors":"R. Brockett","doi":"10.1109/MEMSYS.1989.77960","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77960","url":null,"abstract":"The author establishes a theoretical framework for analyzing and classifying actuators which generate their output by rectifying small-amplitude mechanical vibrations such as might be generated by piezoelectric elements. These ideas are of interest when designing for microfabrication because motors based on these principles: (1) can generate translational output directly without use of rotary bearings; (2) appear to be scalable over several orders of magnitude of the length scale; and (3) appear to be capable of generating mechanical power proportional to driving frequency over several orders of magnitude of frequency. Achieving this performance is dependent on being able to fabricate features, or at least control surface irregularities, on the scale v/w where v is the velocity of the actuator and w is the operating frequency.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123219734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77968
R. Buser, N. D. de Rooij
The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<>
作者描述了在硅中采用电动力激励的微加工音叉。用干涉仪在1 μ bar ~ 2 μ bar的压力范围内测量了谐振频率与q因子的压力依赖性。结果表明，硅中的微加工结构具有与类似石英结构相当的q因子。
{"title":"Tuning forks in silicon","authors":"R. Buser, N. D. de Rooij","doi":"10.1109/MEMSYS.1989.77968","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77968","url":null,"abstract":"The authors describe microfabricated tuning forks in silicon, which are excited electrodynamically. The pressure dependence of the resonance frequency and the Q-factor was measured by an interferometer over a range of pressure 1 mu bar to 2 bar. It is shown that micromachined structures in silicon have Q-factors which are comparable to those of similar quartz structures.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132302065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 1989-02-20DOI: 10.1109/MEMSYS.1989.77963
K. Yang, D. Wilcoxen, G. Gimpelson
Through designed experimental analysis (ANOVA), the etchant concentration, percentage of overetch, and rinse agent used in the undercut process are shown to have significant effects on the size that polysilicon microstructures can be fabricated without collapse. This analysis is carried out for a variety of sacrificial layer materials, with results dependent on the material used. It is shown that these effects are so dramatic that the resulting strain level of the film may be difficult to determine without further analytical study. When microbridges, cantilevers, and proof rings are used to measure the local strain of thin films optically, it is shown that great care must be taken when interpreting the local strain and that further work is needed to develop procedures to eliminate this problem and formulate a theoretical explanation for the physical forces behind the results observed.<>
{"title":"The effects of post-process techniques and sacrificial layer materials on the formation of free standing polysilicon microstructures","authors":"K. Yang, D. Wilcoxen, G. Gimpelson","doi":"10.1109/MEMSYS.1989.77963","DOIUrl":"https://doi.org/10.1109/MEMSYS.1989.77963","url":null,"abstract":"Through designed experimental analysis (ANOVA), the etchant concentration, percentage of overetch, and rinse agent used in the undercut process are shown to have significant effects on the size that polysilicon microstructures can be fabricated without collapse. This analysis is carried out for a variety of sacrificial layer materials, with results dependent on the material used. It is shown that these effects are so dramatic that the resulting strain level of the film may be difficult to determine without further analytical study. When microbridges, cantilevers, and proof rings are used to measure the local strain of thin films optically, it is shown that great care must be taken when interpreting the local strain and that further work is needed to develop procedures to eliminate this problem and formulate a theoretical explanation for the physical forces behind the results observed.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121911401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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