A precise and contactless angle detection sensor using surface micromachining technology

Abstract

A new surface micromachined silicon sensor for highly accurate angle detection is presented. The principle of transduction is based on the Lorentz force in combination with a differential capacitance sensing technique. The transducer may also serve as a reliable position and magnetic field sensor. In contrast to other angle detection sensors, this sensor is completely based on surface micromachining technology. The fabrication of the transducer is therefore fully compatible to the fabrication of other surface micromachined sensors, like accelerometers, yaw rate sensors, etc. This is a very important feature regarding mass production, specially in the automotive industry.