Kevin Houchens, Yaniv Abramovitz, Shay Attal, O. Adan, Nahum Bomshtein, Itai Buks, Ryan Hsieh, T. Itzkovich, Jenny Perry
{"title":"SEM overlay target design using e-beam simulation","authors":"Kevin Houchens, Yaniv Abramovitz, Shay Attal, O. Adan, Nahum Bomshtein, Itai Buks, Ryan Hsieh, T. Itzkovich, Jenny Perry","doi":"10.1117/12.2669984","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":393709,"journal":{"name":"Metrology, Inspection, and Process Control XXXVII","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Metrology, Inspection, and Process Control XXXVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2669984","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}