High precision roundness measurement with two chromatic confocal sensors

Yingzuo Wang, Jiao Bai, Guan-Jie Huang, Qian Zhou, Xiaohao Wang, Xinghui Li
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引用次数: 2

Abstract

As a fundamental geometric indicator, high precision roundness measurement is the basis evaluation index of cylindrical or spherical parts. In most roundness measurements, the rotation platforms are used to bring certain rotation error to the measurement result. Two-probe method is a typical roundness measurement strategy with error separation technique, coming from three-probe method with low cost, online integration, flexible installation, etc. We developed a roundness measurement system with three chromatic confocal displacement sensors with flexibility and high axial-resolution. As the measurement start, two sets of displacement data are achieved to take part in the frequency calculation. A typical cylindrical workpiece was measured for its roundness, which was very close with the measurement result by an ultra-precision roundness meter. In a word, the chromatic confocal roundness measurement system is feasible to provide high precision roundness with two-probe method.
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高精度圆度测量与两个彩色共聚焦传感器
高精度圆度测量作为一项基本的几何指标,是圆柱件或球面件的基本评价指标。在大多数圆度测量中,旋转平台会给测量结果带来一定的旋转误差。双探头法是一种典型的采用误差分离技术的圆度测量策略,它源于三探头法,具有成本低、在线集成、安装灵活等优点。设计了一种具有柔性和高轴向分辨率的三色共焦位移传感器圆度测量系统。在测量开始时,获得两组位移数据参与频率计算。用超精密圆度仪测量了典型圆柱形工件的圆度,结果与测量结果非常接近。综上所述,采用双探头法进行彩色共焦圆度测量是可行的,可以提供高精度的圆度。
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Front Matter: Volume 11899 A wide-spectrum plug-and-play Fizeau interferometric system Mitigation of the impact of Doppler-frequency-shift in a coherent random modulation LiDAR via phase-coded subcarrier modulation Resolution-enhanced phase retrieval for fringe reflection technology with structured light illumination High precision roundness measurement with two chromatic confocal sensors
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