In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.
{"title":"A wide-spectrum plug-and-play Fizeau interferometric system","authors":"Qi Lu, Xu Zhang, Yunbo Bai, Ying Sun, Shijie Liu, J. Shao","doi":"10.1117/12.2603720","DOIUrl":"https://doi.org/10.1117/12.2603720","url":null,"abstract":"In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131074638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optimal inspection strategy planning for 3D geometric measurement based on laser scanning technique","authors":"Sen Zhou, Yikun Xiong, Jian Xu, Tong Liu","doi":"10.1117/12.2600719","DOIUrl":"https://doi.org/10.1117/12.2600719","url":null,"abstract":"","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"164 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122560733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Stress-induced birefringence calibration of large aperture dynamic interferometer based on the rotation of light source polarization state","authors":"Xinyu Miao, Jun Ma, Caojin Yuan","doi":"10.1117/12.2601349","DOIUrl":"https://doi.org/10.1117/12.2601349","url":null,"abstract":"","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"21 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129178218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
As a fundamental geometric indicator, high precision roundness measurement is the basis evaluation index of cylindrical or spherical parts. In most roundness measurements, the rotation platforms are used to bring certain rotation error to the measurement result. Two-probe method is a typical roundness measurement strategy with error separation technique, coming from three-probe method with low cost, online integration, flexible installation, etc. We developed a roundness measurement system with three chromatic confocal displacement sensors with flexibility and high axial-resolution. As the measurement start, two sets of displacement data are achieved to take part in the frequency calculation. A typical cylindrical workpiece was measured for its roundness, which was very close with the measurement result by an ultra-precision roundness meter. In a word, the chromatic confocal roundness measurement system is feasible to provide high precision roundness with two-probe method.
{"title":"High precision roundness measurement with two chromatic confocal sensors","authors":"Yingzuo Wang, Jiao Bai, Guan-Jie Huang, Qian Zhou, Xiaohao Wang, Xinghui Li","doi":"10.1117/12.2602211","DOIUrl":"https://doi.org/10.1117/12.2602211","url":null,"abstract":"As a fundamental geometric indicator, high precision roundness measurement is the basis evaluation index of cylindrical or spherical parts. In most roundness measurements, the rotation platforms are used to bring certain rotation error to the measurement result. Two-probe method is a typical roundness measurement strategy with error separation technique, coming from three-probe method with low cost, online integration, flexible installation, etc. We developed a roundness measurement system with three chromatic confocal displacement sensors with flexibility and high axial-resolution. As the measurement start, two sets of displacement data are achieved to take part in the frequency calculation. A typical cylindrical workpiece was measured for its roundness, which was very close with the measurement result by an ultra-precision roundness meter. In a word, the chromatic confocal roundness measurement system is feasible to provide high precision roundness with two-probe method.","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115396151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Linhua Yang, Shanping Jiang, Z. Gu, Hongsong Li, Gao Li
The spacecraft need to do vacuum thermal tests in a vacuum chamber before they lunched. The solar simulator can simulate the collimation, uniformity and spectrum of the sunlight accurately, which provides higher precision space thermal external flux in the vacuum thermal tests of spacecraft. These solar simulators usually are installed on the vacuum chambers. Its light source is outside the vacuum chamber, the light incidents into the chamber by the optical vacuum sealed window. In order to get uniformity irradiation testing volume, the off-axis collimating solar simulator is selected which installed on the KM6 large vacuum chamber. The main chamber is vertical to place the test-articles, which has the overall height of 22000mm, the diameter of 16000mm. The auxiliary chamber is horizontally to place the collimating reflector of the solar simulator, which has the overall height of 13000mm, the diameter of 7500mm. Thesolar simulator is included optical system, cooling system and control system. The optical system consists of the collector mirrors, the collimating reflector and the optical integrator. This solar simulator is developed successful, and it has finished a vacuum thermal test of the camera. In the test the irradiance of the solar simulator is 1420W/m2, it worked more than 100 hours. The test is successful, and gets more valuable experimental data.
{"title":"The space solar radiation simulation technology for spacecraft vacuum thermal test","authors":"Linhua Yang, Shanping Jiang, Z. Gu, Hongsong Li, Gao Li","doi":"10.1117/12.2601085","DOIUrl":"https://doi.org/10.1117/12.2601085","url":null,"abstract":"The spacecraft need to do vacuum thermal tests in a vacuum chamber before they lunched. The solar simulator can simulate the collimation, uniformity and spectrum of the sunlight accurately, which provides higher precision space thermal external flux in the vacuum thermal tests of spacecraft. These solar simulators usually are installed on the vacuum chambers. Its light source is outside the vacuum chamber, the light incidents into the chamber by the optical vacuum sealed window. In order to get uniformity irradiation testing volume, the off-axis collimating solar simulator is selected which installed on the KM6 large vacuum chamber. The main chamber is vertical to place the test-articles, which has the overall height of 22000mm, the diameter of 16000mm. The auxiliary chamber is horizontally to place the collimating reflector of the solar simulator, which has the overall height of 13000mm, the diameter of 7500mm. Thesolar simulator is included optical system, cooling system and control system. The optical system consists of the collector mirrors, the collimating reflector and the optical integrator. This solar simulator is developed successful, and it has finished a vacuum thermal test of the camera. In the test the irradiance of the solar simulator is 1420W/m2, it worked more than 100 hours. The test is successful, and gets more valuable experimental data.","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127501356","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Dayong Zhu, Roujing Chen, Wenxin Jia, Huaikang Zhu, Qiyuan Zhang, Sen Han
The traditional methods of measuring refractive index have their unique value and advantages. In order to study the properties of materials and the application of multi-wavelength laser interferometer, a new method of measuring refractive index and dispersion of materials is proposed. The multi-wavelength laser interferometer is designed and built based on the principle of the Fizeau interferometer. It integrates five kinds of laser bands with a wide coverage range through a splitting prism, and can quickly change the measurement wavelength during remeasurement and improve the detection efficiency. In order to further verify the refractive index measurement method, a parallel plate is taken as an example to measure the refractive index. The multi-wavelength laser interferometer combined with variable wavelength standard spherical mirror is used to measure the displacement of ray focus in the case of parallel plate or not, and the refractive index of parallel plate is calculated by geometric optics. The refractive index corresponding to each wavelength is measured, and the refractive index curve of the parallel plate material is calculated by Conrady formula and ACF formula by fitting polynomial method using the measured data, and then the dispersion coefficient of the material can be calculated. The comparison results show that the ACF formula can be used to calculate the refractive index of materials accurately in a larger band range. The experimental results also show that the multi-wavelength laser interferometer has the advantage of measuring multi-wavelength transmission wavefront and can also play a role in more measurement applications.
{"title":"Refractive index measurement based on multi-wavelength laser interferometer","authors":"Dayong Zhu, Roujing Chen, Wenxin Jia, Huaikang Zhu, Qiyuan Zhang, Sen Han","doi":"10.1117/12.2601193","DOIUrl":"https://doi.org/10.1117/12.2601193","url":null,"abstract":"The traditional methods of measuring refractive index have their unique value and advantages. In order to study the properties of materials and the application of multi-wavelength laser interferometer, a new method of measuring refractive index and dispersion of materials is proposed. The multi-wavelength laser interferometer is designed and built based on the principle of the Fizeau interferometer. It integrates five kinds of laser bands with a wide coverage range through a splitting prism, and can quickly change the measurement wavelength during remeasurement and improve the detection efficiency. In order to further verify the refractive index measurement method, a parallel plate is taken as an example to measure the refractive index. The multi-wavelength laser interferometer combined with variable wavelength standard spherical mirror is used to measure the displacement of ray focus in the case of parallel plate or not, and the refractive index of parallel plate is calculated by geometric optics. The refractive index corresponding to each wavelength is measured, and the refractive index curve of the parallel plate material is calculated by Conrady formula and ACF formula by fitting polynomial method using the measured data, and then the dispersion coefficient of the material can be calculated. The comparison results show that the ACF formula can be used to calculate the refractive index of materials accurately in a larger band range. The experimental results also show that the multi-wavelength laser interferometer has the advantage of measuring multi-wavelength transmission wavefront and can also play a role in more measurement applications.","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127604352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Yu, Bowen Qiu, Yawei Zhang, Zhongyang Xu, S. Pan
{"title":"Mitigation of the impact of Doppler-frequency-shift in a coherent random modulation LiDAR via phase-coded subcarrier modulation","authors":"F. Yu, Bowen Qiu, Yawei Zhang, Zhongyang Xu, S. Pan","doi":"10.1117/12.2602001","DOIUrl":"https://doi.org/10.1117/12.2602001","url":null,"abstract":"","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114563349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Status of highly accurate flatness metrology at PTB for optics up to 1.5 meters in diameter","authors":"G. Ehret, Jan Spichtinger, M. Schulz","doi":"10.1117/12.2602680","DOIUrl":"https://doi.org/10.1117/12.2602680","url":null,"abstract":"","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"352 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125633881","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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