Micro-ring-resonator wavelength-selective filter using highly-stacked quantum dot intermixed waveguide

Y. Takei, A. Matsumoto, A. Matsushita, K. Akahane, Y. Matsushima, K. Utaka
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Abstract

We fabricated a double micro-ring-resonator wavelength-selective filter using the waveguide fabricated by the intermixing of InAs/InGaAlAs quantum dots grown on an InP (311)B substrate. Intermixing was done by using ICP-RIE etching and annealing technique at a low temperature of 650°C. The output-power contrasts of the device were 9.0 dB and 8.6 dB for TE and TM modes, respectively.
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采用高堆叠量子点混合波导的微环谐振器波长选择滤波器
利用生长在InP (311)B衬底上的InAs/InGaAlAs量子点混合波导制备了双微环谐振器波长选择滤波器。在650℃低温下,采用ICP-RIE蚀刻和退火技术进行混炼。该器件在TE和TM模式下的输出功率对比分别为9.0 dB和8.6 dB。
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