Characteristics of tube-type piezoelectric motor fabricated by aerosol deposition

W. Yoon, B. Hahn, J. Ryu, J. Choi, D. Park, H.O. Choi
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Abstract

Tube-type piezoelectric motor having a volume of 2times2times10 mm3 was fabricated by aerosol deposition of PZT powder on the square-shaped titanium alloy tube. With applying two channels driving voltage the stator generates two orthogonal bending vibration modes which makes wobbling motion of the stator at the resonance frequency. At the frequency of 76.4 kHz with 60 Vpp, rotation speed of the stator was about 1900 rpm and the speed of the stator was increased linearly with applying voltage.
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气溶胶沉积制备管式压电电机的特性研究
将PZT粉末气溶胶沉积在方形钛合金管上,制备了体积为2 × 2 × 10 mm3的管式压电电机。在施加两通道驱动电压的情况下,定子产生两种正交的弯曲振动模式,使定子在谐振频率处进行摆动运动。在76.4 kHz和60 Vpp的频率下,定子的转速约为1900 rpm,定子的转速随电压的增加呈线性增加。
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