Failure analysis challenges

Abstract

Semiconductor trends as embodied in the International Technology Roadmap for Semiconductors (ITRS) provides a guide for the challenges facing the failure analysis community. The technical challenges fall primarily into two categories: failure site isolation and physical analysis. The failure site isolation challenges are driven primarily by the device complexity and reduced accessibility of circuit nets. Additional challenges arise due to the increase in device operating speed and pin count. The challenges in physical analysis are driven primarily by smaller device feature sizes and by the host of new materials being introduced. In addition to the technical challenges, infrastructure changes are also likely to occur. The likely industry paths for addressing these challenges are discussed. The International Sematech Product Analysis Forum (Joseph et al, 2000) has identified ten primary challenges for the future of the failure analysis in the semiconductor industry: localization and electrical characterization; deprocessing techniques for new materials; system-on-a-chip; imaging of small defects and structures; detection and characterization of nonvisual defects; verification and test; globally dispersed entities as virtual factory; fault isolation and simulation software; cost of failure analysis; complexity and volume of data. These challenges have been correlated to the Technology Working Group Difficult Challenge table in the ITRS.