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Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)最新文献

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Software aided failure analysis using ATPG tool 软件辅助故障分析使用ATPG工具
C. Burmer, P. Egger
Automatic test pattern generation (ATPG) is recommended in order to obtain high test coverage quickly. For failure analysis, some standard ATPG tools offer in addition a feature to perform fault diagnosis on full scan designs. Software fault localization techniques become increasingly important in future designs, since in highly complex VHDL programmed designs, a standard analysis using functional test vectors is expendable and time consuming. This paper describes all steps necessary for project set-up and a flow for fault diagnosis. In order to minimize the list of possible failures (given by the tool) and to determine the physical location of the defect (x,y,z), a failure localization flow is presented. Initial results on ICs with both failures purposely induced by focused ion beam and real production failures represents an excellent starting point for further fault localization.
为了快速获得高测试覆盖率,建议使用自动测试模式生成(ATPG)。对于故障分析,一些标准的ATPG工具还提供了对全扫描设计进行故障诊断的功能。软件故障定位技术在未来的设计中变得越来越重要,因为在高度复杂的VHDL编程设计中,使用功能测试向量的标准分析是消耗性的和耗时的。本文描述了项目设置所需的所有步骤和故障诊断流程。为了最小化可能的故障列表(由工具给出)并确定缺陷的物理位置(x,y,z),提出了一个故障定位流程。对集中离子束故意引起的故障和实际生产故障的集成电路的初步结果为进一步定位故障提供了一个很好的起点。
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引用次数: 12
Single contact optical beam induced currents (SCOBIC)-technique and applications 单接触光束感应电流(SCOBIC)技术及应用
J. Chin, M. Palaniappan, J. Phang, D. Chan, C. E. Soh, G. Gilfeather
The single contact optical beam induced currents (SCOBIC) method is a new failure analysis technique. By connecting the substrate or power pins of an integrated circuit to the current amplifier, many junctions can be imaged. This is in contrast to the optical beam induced current (OBIC) technique, where only the junction directly connected to the current amplifier is imaged. The implementation of the SCOBIC approach is discussed and experimental results which validate the SCOBIC technique are presented. Application of the SCOBIC technique for CMOS front side and back side devices is also discussed.
单接触光束感应电流法(SCOBIC)是一种新的失效分析技术。通过将集成电路的衬底或电源引脚连接到电流放大器,可以对许多结进行成像。这与光束感应电流(OBIC)技术相反,在OBIC技术中,只有直接连接到电流放大器的结被成像。讨论了SCOBIC方法的实现,并给出了验证SCOBIC技术的实验结果。讨论了SCOBIC技术在CMOS正面和背面器件中的应用。
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引用次数: 3
Application of passive voltage contrast and focused ion beam on failure analysis of metal via defect in wafer fabrication 无源电压对比和聚焦离子束在金属晶圆制造缺陷失效分析中的应用
G. Ang, Y. Hua, S. K. Loh, Yogaspari, S. Redkar
A case of the application of passive voltage contrast (PVC) and focused ion beam (FIB) to failure analysis of metal interconnection or via defects in wafer fabrication was studied. We have proposed a simple, efficient and cost-saving identification method of locating the 1st, 2nd, 3rd and higher defective vias in the via chain through FIB-induced PVC and its precise cross-sectioning. Such a technique proves useful as it enables us to understand whether all the defective vias in the via chain exhibit the same failure phenomenon or display any particular failure pattern which will help the failure analysis or process engineers to determine the failure mechanism.
研究了无源电压对比(PVC)和聚焦离子束(FIB)在金属互连或通孔缺陷分析中的应用实例。我们提出了一种简单、高效和节省成本的识别方法,通过fib诱导PVC及其精确的横截面来定位通孔链中的第1、2、3及更高的缺陷通孔。这种技术被证明是有用的,因为它使我们能够了解是否所有有缺陷的通孔链表现出相同的失效现象或显示任何特定的失效模式,这将有助于失效分析或工艺工程师确定失效机制。
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引用次数: 4
Effects of elevated-temperature bias stressing on radiation response in power VDMOSFETs 高温偏置应力对大功率vdmosfet辐射响应的影响
N. Stojadinovic, S. Djoric-Veljkovic, I. Manic, V. Davidovic, S. Golubovic
The effects of pre-irradiation elevated-temperature bias stressing on radiation response of power VDMOSFETs have been investigated. Larger irradiation induced threshold voltage shift in stressed devices and considerable mobility reduction in unstressed devices have been observed. The underlying changes of gate oxide-trapped charge and interface trap densities have been calculated and analysed in terms of the mechanisms responsible for pre-irradiation stress effects.
研究了辐照前高温偏置应力对大功率vdmosfet辐射响应的影响。在应力器件中观察到较大的辐照诱导阈值电压位移和在非应力器件中观察到相当大的迁移率降低。根据辐照前应力效应的机制,计算和分析了栅极氧化捕获电荷和界面捕获密度的潜在变化。
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引用次数: 4
Failure mechanism study for high resistance contact in CMOS devices CMOS器件中高阻触点失效机理研究
J. Y. Dai, S. Ansari, C. L. Tay, S. F. Tee, E. Er, S. Redkar
In advanced CMOS manufacturing, when aspects including contacts with W plugs are being miniaturised, high resistance contacts causing low yield becomes a common issue. In failure analysis, contact failures such due to insufficient trench etching and particle blocking which can cause extremely high resistance or opens are relatively easy to isolate and identify. However, for those contacts with resistance marginally higher than normal, the root cause is very difficult to identify by traditional methods like passive voltage contrast (PVC) and scanning electron microscopy (SEM), or focused ion beam (FIB) technology, which is quite successful for the open contact cases. This contact resistance variation is normally due to the narrow process window or process parameters drifting and may lead to relatively low yield. Direct observation of these contacts by transmission electron microscopy (TEM) provides detailed microstructural and chemical information which correlates to the failure and are unobtainable by other material analysis techniques. In this paper, we report a novel failure mechanism of the high resistance contact revealed by TEM study. Direct evidence is provided to show the impact of process changes on the contact structure which may correlate to the high resistance.
在先进的CMOS制造中,当W插头触点小型化时,高电阻触点导致低良率成为一个常见问题。在故障分析中,由于沟槽腐蚀不足和颗粒阻塞导致的接触故障可能导致极高的电阻或打开,相对容易隔离和识别。然而,对于那些电阻略高于正常的触点,很难通过传统的方法,如无源电压对比(PVC)和扫描电子显微镜(SEM),或聚焦离子束(FIB)技术来确定根本原因,这对于开放触点情况是相当成功的。这种接触电阻的变化通常是由于狭窄的工艺窗口或工艺参数漂移,并可能导致相对较低的产量。通过透射电子显微镜(TEM)直接观察这些接触,可以提供与失效相关的详细微观结构和化学信息,这是其他材料分析技术无法获得的。本文报道了TEM研究揭示的一种新型高阻接触失效机理。提供了直接证据,表明工艺变化对接触结构的影响可能与高电阻有关。
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引用次数: 6
Modeling failure modes for submicron devices 亚微米器件的失效模式建模
W. McMahon, A. Haggag, K. Hess
As CMOS technology scales down to the regime where atomic size becomes significant, it has become increasingly important to take a physics-of-failure approach to device design by understanding the underlying mechanisms of MOSFET degradation. We give a model which describes the time dependence of degradation of a general class of failure modes, applying the model specifically to hot-electron interface-state generation. With several typical measurements of device degradation characteristics, this model can be used to derive the failure function and extract the Weibull parameter for failure modes in this class.
随着CMOS技术缩小到原子尺寸变得重要的范围,通过理解MOSFET退化的潜在机制,采用失效物理方法进行器件设计变得越来越重要。我们给出了一个描述一类失效模式退化的时间依赖性的模型,并将该模型专门应用于热电子界面状态的生成。通过对器件退化特性的几种典型测量,该模型可用于导出该类失效模式的失效函数和提取威布尔参数。
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引用次数: 2
Analysis of floating body effects in thin film SOI MOSFETs using the GIDL current technique 用GIDL电流技术分析薄膜SOI mosfet的浮体效应
M. Dunga, A. Kumar, V. Ramgopal Rao
In this paper, we present an analysis of floating body effects in lateral asymmetric channel (LAC) and conventional homogeneously doped channel (uniform) SOI MOSFETs using a novel gate-induced-drain-leakage (GIDL) current technique. The parasitic bipolar current gain /spl beta/ has been experimentally measured for LAC and uniform SOI MOSFETs using the GIDL current technique. The lower parasitic bipolar current gain observed in LAC SOI MOSFETs is explained with the help of 2D device simulations.
本文采用一种新型的栅极感应漏极电流(GIDL)技术,对横向不对称沟道(LAC)和传统均匀掺杂沟道(均匀)SOI mosfet中的浮体效应进行了分析。利用GIDL电流技术对LAC和均匀SOI mosfet的寄生双极电流增益/spl beta/进行了实验测量。利用二维器件模拟解释了在LAC SOI mosfet中观察到的较低寄生双极电流增益。
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引用次数: 13
A rapid evaluation method for degradation activation energy of n-GaAs ohmic contacts with and without TiN diffusion barrier layers 一种n-GaAs欧姆接触降解活化能的快速评价方法
Zhang Wan-rong, Li Zhi-guo, Mu Fu-chen, Wang Li-xin, Sun Ying-hua, Cheng Yao-hai, Chen Jian-xin, Shen Guang-di
A rapid evaluation method, the temperature ramp method, for GaAs MESFET ohmic contacts is proposed. By use of this method, activation energy for ohmic contact degradation can be obtained using less time and a smaller number of samples than traditional methods, and the results are in agreement with those obtained by traditional methods. In accordance with some drawbacks of traditional AuGeNi-Au ohmic contacts, a new ohmic contacts system with TiN diffusion barrier layer is proposed. Experimental results show that the reliability of ohmic contacts with TiN is greatly superior to that of traditional AuGeNi-Au ohmic contacts.
提出了一种快速评价GaAs MESFET欧姆触点的温度斜坡法。与传统方法相比,利用该方法可以用更少的样品和更短的时间得到欧姆接触降解的活化能,其结果与传统方法的结果一致。针对传统AuGeNi-Au欧姆触点存在的一些缺陷,提出了一种具有TiN扩散阻挡层的新型欧姆触点系统。实验结果表明,TiN欧姆接触的可靠性大大优于传统的AuGeNi-Au欧姆接触。
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引用次数: 4
Device degradation of n-channel poly-Si TFTs due to high-field, hot-carrier and radiation stressing 高场、热载子和辐射应力对n沟道多晶硅tft器件性能的影响
A. Khamesra, R. Lal, J. Vasi, K. P. Kumar, J. Sin
There has been increasing interest in polysilicon thin film transistors (TFTs) for high-performance applications, particularly in high-resolution displays. For these applications, the primary requirement is that the TFTs have a low threshold voltage, low and stable leakage current and reasonably high carrier mobility. The poly-Si TFTs typically have sufficiently large mobilities to be used for high-drive and moderately high-frequency applications. However, since low temperatures are used in poly-Si TFT fabrication, both semiconducting and insulating layers are of poorer quality than those used in crystalline-Si technology. Consequently, long term TFT stability is an important issue. A considerable amount of research has focused on the stability of poly-Si TFTs. The instabilities are basically associated with hot carrier injection and degradation, negative gate bias instability and gate-induced carrier injection and trapping (Young, 1996). This leads to degradation of several device parameters such as threshold voltage, mobility, transconductance, and subthreshold slope. The work presented here is a comprehensive study of degradation in low temperature (/spl les/600/spl deg/C) poly-Si TFTs due to high-field, hot-carrier and ionizing radiation stressing. This unified approach makes it possible to identify the key reasons for degradation. Furthermore, a systematic study of the dependence on device geometry, as reported here, also helps understanding of the degradation mechanisms.
人们对多晶硅薄膜晶体管(TFTs)的高性能应用越来越感兴趣,特别是在高分辨率显示器中。对于这些应用,主要要求是TFTs具有低阈值电压,低而稳定的泄漏电流和合理的高载流子迁移率。多晶硅tft通常具有足够大的迁移率,可用于高驱动和中等高频应用。然而,由于低温用于多晶硅TFT制造,半导体层和绝缘层的质量都比晶体硅技术中的质量差。因此,TFT的长期稳定性是一个重要的问题。大量的研究集中在多晶硅晶体管的稳定性上。不稳定性基本上与热载流子注入和降解、负栅极偏置不稳定性和栅极诱导载流子注入和捕获有关(Young, 1996)。这会导致几个器件参数的退化,如阈值电压、迁移率、跨导和亚阈值斜率。本文对低温(/spl les/600/spl℃)多晶硅tft在高场、热载子和电离辐射胁迫下的降解进行了全面研究。这种统一的方法使识别退化的主要原因成为可能。此外,对器件几何形状依赖性的系统研究也有助于理解退化机制。
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引用次数: 9
ESD effect in GMR heads in the trim shunt tab process 在微调分流卡卡过程中,GMR磁头中的ESD效应
A. Siritaratiwat, N. Suwannata, J. Pinnoi, C. Puprichitkun
The electrostatic discharge (ESD) effect is widely known as a main cause of damage in giant magnetoresistance (GMR) heads (Wallash and Kim, 1995). The transient current may strike the GMR head directly by passing the leads (Li-Yan Zhu, 1999) and this may be prevented by shunting the GMR leads (Bajorek et al, 1995). However, after completing the head gimbal assembly (HGA) production, the shunt leads have to be trimmed in order to test its electrical characteristics. This is thought to cause the ESD effect while trimming the shunt tab of a GMR head, and is investigated here.
众所周知,静电放电(ESD)效应是巨磁电阻(GMR)磁头损坏的主要原因(Wallash和Kim, 1995)。暂态电流可以通过引线直接冲击GMR磁头(朱立岩,1999),这可以通过分流GMR引线来防止(Bajorek等人,1995)。然而,在完成头万向节组件(HGA)生产后,分流引线必须修剪,以测试其电气特性。在修整GMR头的分流标签时,这被认为会导致ESD效应,并在这里进行了研究。
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引用次数: 1
期刊
Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)
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