{"title":"Fabrication of silicon quarter wave plate at Terahertz frequency","authors":"S. Saha, Yong Ma, J. Grant, A. Khalid, D. Cumming","doi":"10.1109/PHOTWTM.2010.5421976","DOIUrl":null,"url":null,"abstract":"We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%.","PeriodicalId":367324,"journal":{"name":"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE Photonics Society Winter Topicals Meeting Series (WTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PHOTWTM.2010.5421976","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%.
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