The Frequency Avoid-Crossing Effect Induced by the Hybrid Modal Coupling in a Disk MEMS Resonator Gyroscope

Abstract

This paper reports the frequency avoid-crossing effect induced by the hybrid modal coupling in a disk resonator gyroscope. In the case of stiffness mismatch, the orthogonal response signals of hybrid modes can be simultaneously detected due to the existence of stiffness axis deflection angle. With the changing bias voltage, the hybrid modal coupling between the same-order eigenmodes can be described theoretically and experimentally. When two hybrid modal frequencies are gradually approximated, the frequency avoid-crossing effect appears under the influence of the stiffness axis declination. It demonstrates that the avoid-crossing region is determined by the stiffness axis declination, which reflects the hybrid modal coupling strength and provides guidelines for the tunable hybrid couplings.