Xi Wang, Y. Xu, G. Xia, Yang Zhao, Jian Zhao, A. Qiu, Yan Su
{"title":"A 27μW MEMS silicon oscillating accelerometer with bias instability and 10-μg/√Hz noise floor","authors":"Xi Wang, Y. Xu, G. Xia, Yang Zhao, Jian Zhao, A. Qiu, Yan Su","doi":"10.1109/ISISS.2018.8358117","DOIUrl":null,"url":null,"abstract":"This paper describes an in-plane ultra-low power Micro Electro-Mechanical System (MEMS) silicon oscillating accelerometer (SOA) based on pierce oscillators with CMOS readout circuit and automatic amplitude control (AAC). A noise model is proposed to analyze various noise sources in the system. The noises from the readout circuit are minimized so that the SOA performance is dominated by the Brownian noise from MEMS transducer. The fabricated MEMS SOA achieves a bias instability of 4 μg and a noise floor of 10 μg/√Hz, while consuming only 27 μW under a 1.8-V supply.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"85 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISISS.2018.8358117","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This paper describes an in-plane ultra-low power Micro Electro-Mechanical System (MEMS) silicon oscillating accelerometer (SOA) based on pierce oscillators with CMOS readout circuit and automatic amplitude control (AAC). A noise model is proposed to analyze various noise sources in the system. The noises from the readout circuit are minimized so that the SOA performance is dominated by the Brownian noise from MEMS transducer. The fabricated MEMS SOA achieves a bias instability of 4 μg and a noise floor of 10 μg/√Hz, while consuming only 27 μW under a 1.8-V supply.
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