Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358157
J. Giner, K. Ono
In this work, we explored a programmable compensation capacitance methodology to mitigate the effects of feedthrough current and offset in two widely used detection architectures in a newly developed concentrated spring MEMS gyroscope: differential drive-sense and electromechanical amplitude modulation architecture. This study is based on a recently launched commercial MEMS development platform, AS3125-SDK, which contains a multichannel high-performance reconfigurable IC front-end and a high speed FPGA with micro controllers that allows for implementation of calibration and control of MEMS inertial sensors. We used programmable arrayed trimming capacitors to remove feedthrough and increase the dynamic range of the amplifiers by 30dB in the direct differential. The same technique demonstrated a 10dB improvement in the sense channel and reduce the offset in the drive channel for the electromechanical amplitude modulation architecture.
{"title":"Adaptive feedthrough cancellation in MEMS gyroscopes in reconfigurable IC+FPGA platform","authors":"J. Giner, K. Ono","doi":"10.1109/ISISS.2018.8358157","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358157","url":null,"abstract":"In this work, we explored a programmable compensation capacitance methodology to mitigate the effects of feedthrough current and offset in two widely used detection architectures in a newly developed concentrated spring MEMS gyroscope: differential drive-sense and electromechanical amplitude modulation architecture. This study is based on a recently launched commercial MEMS development platform, AS3125-SDK, which contains a multichannel high-performance reconfigurable IC front-end and a high speed FPGA with micro controllers that allows for implementation of calibration and control of MEMS inertial sensors. We used programmable arrayed trimming capacitors to remove feedthrough and increase the dynamic range of the amplifiers by 30dB in the direct differential. The same technique demonstrated a 10dB improvement in the sense channel and reduce the offset in the drive channel for the electromechanical amplitude modulation architecture.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122686306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358141
I. Prikhodko, Brock Bearss, Carey Merritt, J. Bergeron, Charles Blackmer
In this work, we experimentally demonstrate strapdown inertial navigation for automobiles with position errors reaching GPS-like accuracies by using a tactical-grade MEMS gyroscope in an Inertial Measurement Unit (IMU) for attitude estimation and a speedometer for velocity estimation. This paper also analyzes the propagation of sensor errors into position error and determines that the gyroscope rate integration error due to combined Angle Random Walk (ARW) and Bias Instability (BI) is the dominant source. We conclude that dead-reckoning the position using tactical-grade MEMS gyroscopes without aiding is feasible for car navigation over 10 minutes with the 30 m position rms error dominated by gyroscope errors (GPS accuracy is 15 m).
{"title":"Towards self-navigating cars using MEMS IMU: Challenges and opportunities","authors":"I. Prikhodko, Brock Bearss, Carey Merritt, J. Bergeron, Charles Blackmer","doi":"10.1109/ISISS.2018.8358141","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358141","url":null,"abstract":"In this work, we experimentally demonstrate strapdown inertial navigation for automobiles with position errors reaching GPS-like accuracies by using a tactical-grade MEMS gyroscope in an Inertial Measurement Unit (IMU) for attitude estimation and a speedometer for velocity estimation. This paper also analyzes the propagation of sensor errors into position error and determines that the gyroscope rate integration error due to combined Angle Random Walk (ARW) and Bias Instability (BI) is the dominant source. We conclude that dead-reckoning the position using tactical-grade MEMS gyroscopes without aiding is feasible for car navigation over 10 minutes with the 30 m position rms error dominated by gyroscope errors (GPS accuracy is 15 m).","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123970009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358126
M. Izadi, F. Braghin, D. Giannini, D. Milani, F. Resta, M. Brunetto, L. Falorni, G. Gattere, L. Guerinoni, C. Valzasina
This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexural beams, which have been poorly investigated in the literature. A device-level numerical simulation tool to evaluate the effects of beams' anisoelasticity on quadrature is developed and validated through the comparison with 3D FEM simulations.
{"title":"A comprehensive model of beams' anisoelasticity in MEMS gyroscopes, with focus on the effect of axial non-vertical etching","authors":"M. Izadi, F. Braghin, D. Giannini, D. Milani, F. Resta, M. Brunetto, L. Falorni, G. Gattere, L. Guerinoni, C. Valzasina","doi":"10.1109/ISISS.2018.8358126","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358126","url":null,"abstract":"This paper describes a comprehensive approach to model and efficiently simulate the behavior of MEMS gyroscopes in presence of beams' anisoelasticity, that causes out-of-plane mechanical quadrature. Special focus is given to the effects of non-vertical etching along the axial direction of flexural beams, which have been poorly investigated in the literature. A device-level numerical simulation tool to evaluate the effects of beams' anisoelasticity on quadrature is developed and validated through the comparison with 3D FEM simulations.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"30 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124615478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358132
A. Challoner, Jeremy, D. Popp, J. Beitia
This paper presents the digital control of a symmetric, piezoelectrically-transduced Coriolis Vibratory Gyro (CVG) with improved performance and design for compact ASIC implementation in terrestrial and space environments. Previously a metallic PZT transduced cylindrical resonator with simple analog control electronics resulted in a successful low noise rate gyro produced by Innalabs [1, 2] for stabilization and targeting applications and satellite pointing. This work details key benefits of applying a very low noise digital control and demodulation approach that extends InertialWave's previous work on generalized feedback control of capacitive CVG's [3]. This has been demonstrated at breadboard level to further reduce rate noise toward the very low, 60 μdeg/rt-h mechanical thermal noise (MTN) inherent in its massive 23 mm, high quality resonator and points to a clear path for achieving navigation grade performance in a mass producible CVG and compact three-axis IRU or IMU assembly.
{"title":"Symmetric piezoelectric CVG with digital control electronics","authors":"A. Challoner, Jeremy, D. Popp, J. Beitia","doi":"10.1109/ISISS.2018.8358132","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358132","url":null,"abstract":"This paper presents the digital control of a symmetric, piezoelectrically-transduced Coriolis Vibratory Gyro (CVG) with improved performance and design for compact ASIC implementation in terrestrial and space environments. Previously a metallic PZT transduced cylindrical resonator with simple analog control electronics resulted in a successful low noise rate gyro produced by Innalabs [1, 2] for stabilization and targeting applications and satellite pointing. This work details key benefits of applying a very low noise digital control and demodulation approach that extends InertialWave's previous work on generalized feedback control of capacitive CVG's [3]. This has been demonstrated at breadboard level to further reduce rate noise toward the very low, 60 μdeg/rt-h mechanical thermal noise (MTN) inherent in its massive 23 mm, high quality resonator and points to a clear path for achieving navigation grade performance in a mass producible CVG and compact three-axis IRU or IMU assembly.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130571679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358121
Y. Korkishko, V. Fedorov, V. Prilutskiy, V. Ponomarev, I. Fedorov, S. Kostritskii, I. Morev, D. Obuhovich, S. Prilutskiy, A. Zuev, V. Varnakov
Today interferometric fiber-optic gyroscopes (FOGs) reach ultimate theoretical performance and surpass well-established competitor, the ring laser gyroscopes. Due to its inherent low random noise and its scalability, FOG technology is one of the very few technologies able to cope with the applications requiring the highest performance. Recently, Optolink has presented new fiber-optic gyroscope SRS-5000 with bias performance, amongst the best closed loop fiber-optic gyroscope performance published to date. The aim of the current work was to produce and to estimate the performance of inertial measurement unit (IMU) and strapdown inertial navigation systems (SINS) pilot series on the basis of SRS-5000 FOG — IMU-5000 and SINS-5000, correspondingly. Measured device parameters (ARW around 0.000069 deg/Vh with a bias stability of better than 0.00008 deg/h) allow to assess these kind of devices as the highest-precision strategic grade fiber-optic gyroscopes' based IMU, commercially available. Pilot units of SINS-5000 show alignment accuracy limit down to RMS 0.005° in series of 9-minute alignments. Static tests show coordinates drift of ∼10 Nm over 7 days of operation. We believe the performance of these strategic-grade IMU and SINS may be useful in a range of high precision navigation, metrology, seismology, and structural sensing applications, as well as calibration of inertial test equipment.
{"title":"High-precision inertial measurement unit IMU-5000","authors":"Y. Korkishko, V. Fedorov, V. Prilutskiy, V. Ponomarev, I. Fedorov, S. Kostritskii, I. Morev, D. Obuhovich, S. Prilutskiy, A. Zuev, V. Varnakov","doi":"10.1109/ISISS.2018.8358121","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358121","url":null,"abstract":"Today interferometric fiber-optic gyroscopes (FOGs) reach ultimate theoretical performance and surpass well-established competitor, the ring laser gyroscopes. Due to its inherent low random noise and its scalability, FOG technology is one of the very few technologies able to cope with the applications requiring the highest performance. Recently, Optolink has presented new fiber-optic gyroscope SRS-5000 with bias performance, amongst the best closed loop fiber-optic gyroscope performance published to date. The aim of the current work was to produce and to estimate the performance of inertial measurement unit (IMU) and strapdown inertial navigation systems (SINS) pilot series on the basis of SRS-5000 FOG — IMU-5000 and SINS-5000, correspondingly. Measured device parameters (ARW around 0.000069 deg/Vh with a bias stability of better than 0.00008 deg/h) allow to assess these kind of devices as the highest-precision strategic grade fiber-optic gyroscopes' based IMU, commercially available. Pilot units of SINS-5000 show alignment accuracy limit down to RMS 0.005° in series of 9-minute alignments. Static tests show coordinates drift of ∼10 Nm over 7 days of operation. We believe the performance of these strategic-grade IMU and SINS may be useful in a range of high precision navigation, metrology, seismology, and structural sensing applications, as well as calibration of inertial test equipment.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115848202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358144
D. D. Shin, D. Heinz, Hyun-Keun Kwon, Yunhan Chen, T. Kenny
This paper reports the results of a diffusion doping-based method of controlling the temperature coefficient of frequency (TCf) of MEMS resonators. In this work, a suite of resonators from two different wafers — one with and one without diffusion doping — is characterized and compared. By diffusing dopants through exposed sidewalls of silicon resonators within an epitaxial polysilicon encapsulation process, this technique demonstrates a dramatic reduction in the resonator's frequency-temperature sensitivity, one of the significant disadvantages of silicon as a resonator material. Moreover, because thicker geometries are less affected by lateral diffusion, this method provides capability to independently manipulate frequency-temperature behaviors of different resonant systems fabricated on the same wafer.
{"title":"Lateral diffusion doping of silicon for temperature compensation of MEMS resonators","authors":"D. D. Shin, D. Heinz, Hyun-Keun Kwon, Yunhan Chen, T. Kenny","doi":"10.1109/ISISS.2018.8358144","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358144","url":null,"abstract":"This paper reports the results of a diffusion doping-based method of controlling the temperature coefficient of frequency (TCf) of MEMS resonators. In this work, a suite of resonators from two different wafers — one with and one without diffusion doping — is characterized and compared. By diffusing dopants through exposed sidewalls of silicon resonators within an epitaxial polysilicon encapsulation process, this technique demonstrates a dramatic reduction in the resonator's frequency-temperature sensitivity, one of the significant disadvantages of silicon as a resonator material. Moreover, because thicker geometries are less affected by lateral diffusion, this method provides capability to independently manipulate frequency-temperature behaviors of different resonant systems fabricated on the same wafer.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115145310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358120
B. Lunin, M. Basarab, Aleksei Chumankin, A. Yurin
Design and simple manufacturing technology of inexpensive quartz resonators for Coriolis vibratory gyroscopes (CVGs) of medium and low accuracy are proposed. The resonators are made from a piece of a commercially available fused quartz tube. The proposed technology makes it possible to produce such resonators without the use of precision machining, while the quality factor of such a resonator in the kilohertz frequency range reaches 1,000,000. Although this quality factor is much lower than that of precision quartz hemispherical resonators, it considerably exceeds the Q-factor of metal cylindrical resonators. In addition, the stability of the dissipative characteristics of the new resonators is also significantly increased. On the whole, this reduces the systematic drift of the device and its instability. These advantages of the new resonators allow us to significantly increase the accuracy of CVGs for inertial systems of medium and low accuracy without increasing their cost price. The report presents the designs and characteristics of such resonators, the methods of their balancing, as well as the possible constructive appearance of CVGs based on such resonators.
{"title":"Quartz cylindrical resonators for mid-accuracy coriolis vibratory gyroscopes","authors":"B. Lunin, M. Basarab, Aleksei Chumankin, A. Yurin","doi":"10.1109/ISISS.2018.8358120","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358120","url":null,"abstract":"Design and simple manufacturing technology of inexpensive quartz resonators for Coriolis vibratory gyroscopes (CVGs) of medium and low accuracy are proposed. The resonators are made from a piece of a commercially available fused quartz tube. The proposed technology makes it possible to produce such resonators without the use of precision machining, while the quality factor of such a resonator in the kilohertz frequency range reaches 1,000,000. Although this quality factor is much lower than that of precision quartz hemispherical resonators, it considerably exceeds the Q-factor of metal cylindrical resonators. In addition, the stability of the dissipative characteristics of the new resonators is also significantly increased. On the whole, this reduces the systematic drift of the device and its instability. These advantages of the new resonators allow us to significantly increase the accuracy of CVGs for inertial systems of medium and low accuracy without increasing their cost price. The report presents the designs and characteristics of such resonators, the methods of their balancing, as well as the possible constructive appearance of CVGs based on such resonators.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126031652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358156
Yunyi Shu, Y. Hirai, T. Tsuchiya, O. Tabata
In this paper, we proposed a non-uniform radial width design of mode-matched vibratory ring gyroscope (VRG) to compensate the anisotropy in in-plane Young's modulus of (100) single crystal silicon (SCS). The measured frequency splits of the “wineglass” modes for VRGs with uniform width and modified width were about 180 and 46 Hz, respectively, which shows good agreement with the simulated results by finite element analysis (FEA). Then the electrostatic tuning was applied to eliminate frequency splits and realize mode-matching.
{"title":"Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope","authors":"Yunyi Shu, Y. Hirai, T. Tsuchiya, O. Tabata","doi":"10.1109/ISISS.2018.8358156","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358156","url":null,"abstract":"In this paper, we proposed a non-uniform radial width design of mode-matched vibratory ring gyroscope (VRG) to compensate the anisotropy in in-plane Young's modulus of (100) single crystal silicon (SCS). The measured frequency splits of the “wineglass” modes for VRGs with uniform width and modified width were about 180 and 46 Hz, respectively, which shows good agreement with the simulated results by finite element analysis (FEA). Then the electrostatic tuning was applied to eliminate frequency splits and realize mode-matching.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130937641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358151
P. Rajai, Matthew Straeten, Jiewen Liu, G. Xereas, M. Ahamed
In this paper, an analytical model is presented to predict the temperature sensitivity of doped silicon MEMS resonator. Temperature coefficients of three elastic constants (C11, C12 and C44) were predicted and found in good agreement (∼1%) with the experimental values previously reported in the literature. The model was then extended to find relationship between doping and temperate-compensated frequency. Our model shows that the Lame mode frequency of a MEMS resonator can be compensated via an optimum n-doping of around 4×1019cm−3 for working temperature between −40°C to 100 °C.
{"title":"Modeling of temperature frequency-compensation of doped silicon MEMS resonator","authors":"P. Rajai, Matthew Straeten, Jiewen Liu, G. Xereas, M. Ahamed","doi":"10.1109/ISISS.2018.8358151","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358151","url":null,"abstract":"In this paper, an analytical model is presented to predict the temperature sensitivity of doped silicon MEMS resonator. Temperature coefficients of three elastic constants (C<inf>11</inf>, C<inf>12</inf> and C<inf>44</inf>) were predicted and found in good agreement (∼1%) with the experimental values previously reported in the literature. The model was then extended to find relationship between doping and temperate-compensated frequency. Our model shows that the Lame mode frequency of a MEMS resonator can be compensated via an optimum n-doping of around 4×10<sup>19</sup>cm<sup>−3</sup> for working temperature between −40°C to 100 °C.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"74 6","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120897110","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-03-26DOI: 10.1109/ISISS.2018.8358112
Martin Putnik, Stefano Cardanobile, Mateusz Sniegucki, S. Kehrberg, M. Kuehnel, Peter Degenfeld-Schonburg, Cristian Nagel, J. Mehner
We compare different simulation methods for the development of reduced order models (ROM) that feature a geometric nonlinear drive motion in a MEMS device. We benchmark three different simulation methods by comparing the results to measured frequency shifts of a MEMS gyroscope. We find that quasi-static points in the dynamic trajectory of the gyroscope are suitable deflection states for generating the modal stiffness. Furthermore, we show an efficient simulation method that overcomes the burden of the transient FE simulation while exhibiting similar accuracy.
{"title":"Simulation methods for generating reduced order models of MEMS sensors with geometric nonlinear drive motion","authors":"Martin Putnik, Stefano Cardanobile, Mateusz Sniegucki, S. Kehrberg, M. Kuehnel, Peter Degenfeld-Schonburg, Cristian Nagel, J. Mehner","doi":"10.1109/ISISS.2018.8358112","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358112","url":null,"abstract":"We compare different simulation methods for the development of reduced order models (ROM) that feature a geometric nonlinear drive motion in a MEMS device. We benchmark three different simulation methods by comparing the results to measured frequency shifts of a MEMS gyroscope. We find that quasi-static points in the dynamic trajectory of the gyroscope are suitable deflection states for generating the modal stiffness. Furthermore, we show an efficient simulation method that overcomes the burden of the transient FE simulation while exhibiting similar accuracy.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126444452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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