{"title":"Design optimization of MEMS piezoelectric energy harvester","authors":"D. Hoffmann, T. Bechtold, D. Hohlfeld","doi":"10.1109/EUROSIME.2016.7463403","DOIUrl":null,"url":null,"abstract":"This work presents an optimization strategy towards extending the operational frequency range of piezoelectric MEMS energy harvesting devices. We propose to use coupled micromechanical resonators to enable efficient energy harvesting at multiple frequencies with a single device. The proposed design, obtained by optimization algorithms, exhibits closely spaced eigenfrequencies with equal power delivery.","PeriodicalId":438097,"journal":{"name":"2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUROSIME.2016.7463403","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This work presents an optimization strategy towards extending the operational frequency range of piezoelectric MEMS energy harvesting devices. We propose to use coupled micromechanical resonators to enable efficient energy harvesting at multiple frequencies with a single device. The proposed design, obtained by optimization algorithms, exhibits closely spaced eigenfrequencies with equal power delivery.
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