{"title":"Equilibrium and Stability of Micro-Cantilevers Used in Atomic Force Microscopy","authors":"J. Zu, G. Cheng, Q. Tang","doi":"10.1109/ICMENS.2004.62","DOIUrl":null,"url":null,"abstract":"The equilibrium states and their stability of micro-cantilevers used in the AFM under the noncontact and contact mode operations are studied with the energy method. The focus of the study is laid on the influence of the length of the micro-cantilever as well as its working distance from the sample surface upon the system’s equilibrium state. The findings from this study can provide useful guidance to the design of micro-cantilevers in the AFM.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"96 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2004.62","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The equilibrium states and their stability of micro-cantilevers used in the AFM under the noncontact and contact mode operations are studied with the energy method. The focus of the study is laid on the influence of the length of the micro-cantilever as well as its working distance from the sample surface upon the system’s equilibrium state. The findings from this study can provide useful guidance to the design of micro-cantilevers in the AFM.
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