A novel MEMS tunable capacitor with a high tuning ratio is presented in this paper. The novel tunable capacitor consists of two parallel electrodes, i.e., fixed and moving electrodes and six bi-directional electrostatic actuators, which are able to produce both attractive and repulsive force to drive the moving electrode. So the novel tunable capacitor is able to move in both directions, up and down, away form its static position and therefore achieve a large tuning ratio. Numerical simulations are used to verify the working principle of the novel tunable capacitor and predict that a tuning ratio of 3:1 can be achieved at a driving voltage of 16 volts.
{"title":"A Novel MEMS Tunable Capacitor","authors":"Siyuan He, R. Mrad","doi":"10.1109/ICMENS.2004.15","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.15","url":null,"abstract":"A novel MEMS tunable capacitor with a high tuning ratio is presented in this paper. The novel tunable capacitor consists of two parallel electrodes, i.e., fixed and moving electrodes and six bi-directional electrostatic actuators, which are able to produce both attractive and repulsive force to drive the moving electrode. So the novel tunable capacitor is able to move in both directions, up and down, away form its static position and therefore achieve a large tuning ratio. Numerical simulations are used to verify the working principle of the novel tunable capacitor and predict that a tuning ratio of 3:1 can be achieved at a driving voltage of 16 volts.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121832052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
L. Phong, J. Lee, I. Ressejac, M. Maszkiewicz, W. Zheng, S. Crisan, L. L. Noc, F. Picard, H. Jerominek
The use of light beam micromanipulators in space subsystems has received particular attention in recent years. To compensate for changes in system parameters during the flight, these devices require closed loop control. This paper reports on an integrated feedback mechanism devised for flexural tortional devices. It consists in using monolithically embedded photodetectors to measure the portion of incident light crossing an aperture created in the manipulator. The manipulator position is determined from the detector section shadowed by the displaced aperture. A model is presented for the electrostatically actuated manipulator, predicting effects of structural parameters on angular displacement and resolution. As proof of concept, photodiode assisted closed loop manipulators were microfabricated in varying configurations on Si wafer. Their characteristics of deflection versus actuation voltage were better than those predicted by the model. The feedback mechanism was validated in light of the good agreement between differential photocurrents measured from contiguous photodiodes and theoretical prediction. Details on device modeling, microfabrication, and characterization are reported.
{"title":"Closed Loop Micromanipulators for Optical Metrology","authors":"L. Phong, J. Lee, I. Ressejac, M. Maszkiewicz, W. Zheng, S. Crisan, L. L. Noc, F. Picard, H. Jerominek","doi":"10.1109/ICMENS.2004.43","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.43","url":null,"abstract":"The use of light beam micromanipulators in space subsystems has received particular attention in recent years. To compensate for changes in system parameters during the flight, these devices require closed loop control. This paper reports on an integrated feedback mechanism devised for flexural tortional devices. It consists in using monolithically embedded photodetectors to measure the portion of incident light crossing an aperture created in the manipulator. The manipulator position is determined from the detector section shadowed by the displaced aperture. A model is presented for the electrostatically actuated manipulator, predicting effects of structural parameters on angular displacement and resolution. As proof of concept, photodiode assisted closed loop manipulators were microfabricated in varying configurations on Si wafer. Their characteristics of deflection versus actuation voltage were better than those predicted by the model. The feedback mechanism was validated in light of the good agreement between differential photocurrents measured from contiguous photodiodes and theoretical prediction. Details on device modeling, microfabrication, and characterization are reported.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"27 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115760167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Boom, J. Leijtens, L. V. Duivenbode, N. V. D. Heiden
A novel micro Digital Sun Sensor ( µDSS) is under development in the frame of a micro systems technology (MST) development program (Microned) from the Dutch Ministry of Economic Affairs. Use of available micro system technologies in combination with the implementation of a dedicated solarcell for power supply and a wireless link for data communication allows TNO TPD to develop a truly autonomous and wireless sun sensor. Such a "system in a package" is small enough to be flown on a microsatellite [4]. Although several technical challenges still exist, it seems feasible to build a sensor that will be at least one order of magnitude lower in weight as compared to the current generation sensors (<30 grams) and consumes no external power. These characteristics allow it to fly this sensor on satellites that are so small that inclusion of a fine sun sensor until now has not been feasible.
{"title":"Micro Digital Sun Sensor: System in a Package","authors":"C. Boom, J. Leijtens, L. V. Duivenbode, N. V. D. Heiden","doi":"10.1109/ICMENS.2004.92","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.92","url":null,"abstract":"A novel micro Digital Sun Sensor ( µDSS) is under development in the frame of a micro systems technology (MST) development program (Microned) from the Dutch Ministry of Economic Affairs. Use of available micro system technologies in combination with the implementation of a dedicated solarcell for power supply and a wireless link for data communication allows TNO TPD to develop a truly autonomous and wireless sun sensor. Such a \"system in a package\" is small enough to be flown on a microsatellite [4]. Although several technical challenges still exist, it seems feasible to build a sensor that will be at least one order of magnitude lower in weight as compared to the current generation sensors (<30 grams) and consumes no external power. These characteristics allow it to fly this sensor on satellites that are so small that inclusion of a fine sun sensor until now has not been feasible.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125854492","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We introduce a formal grammatical process for planar self-assembling systems with conformal switching which instantiates the geometry of the tiles. This extends prior work which gave a grammatical structure that models only the topology of the assembly. The addition of geometric data leads to the problem of determining which sets of grammatical rules preserve the planar constraint. We illustrate global obstructions while generating examples of rule sets which intrinsically force the preservation of planar geometry.
{"title":"Grammatical Self Assembly for Planar Tiles","authors":"R. Ghrist, D. Lipsky","doi":"10.1109/ICMENS.2004.76","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.76","url":null,"abstract":"We introduce a formal grammatical process for planar self-assembling systems with conformal switching which instantiates the geometry of the tiles. This extends prior work which gave a grammatical structure that models only the topology of the assembly. The addition of geometric data leads to the problem of determining which sets of grammatical rules preserve the planar constraint. We illustrate global obstructions while generating examples of rule sets which intrinsically force the preservation of planar geometry.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125865026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A new analytical model of Scratch Drive Actuator (SDA) is proposed, which considers its deforming states and geometry characteristics. This model contains three kinds of conditions: low driving voltage, critical driving voltage and high driving voltage. The storing strain energy in the SDA is studied under different conditions because the working performance of the SDA mainly depends on it. Analysis results demonstrate that it is necessary to choose appropriate design parameters of the SDA so that the SDA works near the critical state. Finally, discussions and suggestions for the design of SDA are presented in this paper.
{"title":"Analytical Modeling and Quantitative Analysis of Scratch Drive Actuator","authors":"J. Zu, Q. Qu, G. Cheng","doi":"10.1109/ICMENS.2004.32","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.32","url":null,"abstract":"A new analytical model of Scratch Drive Actuator (SDA) is proposed, which considers its deforming states and geometry characteristics. This model contains three kinds of conditions: low driving voltage, critical driving voltage and high driving voltage. The storing strain energy in the SDA is studied under different conditions because the working performance of the SDA mainly depends on it. Analysis results demonstrate that it is necessary to choose appropriate design parameters of the SDA so that the SDA works near the critical state. Finally, discussions and suggestions for the design of SDA are presented in this paper.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115203760","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Three designs of passive microfluidic mixers (fabricated using Micralyne Protolyne technology on a glass substrate) are studied and compared to a basic straight channel diffusion mixer. The designs are analyzed under continuous and pulsating flow conditions using numerical and experimental tools; specifically finite element analysis and particle image velocimetry. Testing and analysis are performed at pressures that can be generated using reciprocating membrane micropumps integrated into a Micro Total Analysis System. It is determined that one of the proposed mixer concepts outperforms all of the other designs considered and enhanced mixing is achieved under pulsating flow. Performance is judged based on criteria that describes the amount of mixing performed, the concentration uniformity at the outlet of the mixer, and the net flow rate. Recommendations are made on how to improve the overall performance of the passive micromixers.
{"title":"A Study of Passive Microfluidic Mixers","authors":"P. Chiarot, R. Mrad, P. Sullivan","doi":"10.1109/ICMENS.2004.23","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.23","url":null,"abstract":"Three designs of passive microfluidic mixers (fabricated using Micralyne Protolyne technology on a glass substrate) are studied and compared to a basic straight channel diffusion mixer. The designs are analyzed under continuous and pulsating flow conditions using numerical and experimental tools; specifically finite element analysis and particle image velocimetry. Testing and analysis are performed at pressures that can be generated using reciprocating membrane micropumps integrated into a Micro Total Analysis System. It is determined that one of the proposed mixer concepts outperforms all of the other designs considered and enhanced mixing is achieved under pulsating flow. Performance is judged based on criteria that describes the amount of mixing performed, the concentration uniformity at the outlet of the mixer, and the net flow rate. Recommendations are made on how to improve the overall performance of the passive micromixers.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124558752","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. McQuarrie, G. Miller, Mavanur R. Suresh, John R. Mercer
A multistep radioimmunotherapeutic (RIT) approach, exploiting the combination of a bispecific monoclonal antibody (BsMAb) with 90Y labelled biotinylated long-circulating liposomes was tested as a potential adjuvant treatment for epithelial ovarian carcinomatosis. The BsMAb, with anti-CA 125 and anti-biotin epitopes was used with PEGylated liposomes coated with biotin to deliver the cytotoxic radionuclide 90Y to tumor sites. This approach was used to overcome some of the major obstacles associated with conventional strategies, in particular, to increase the amount of radioactivity delivered to the tumor site compared with conventional monoclonal antibody (MAb) radionuclide delivery. Sequential intraperitoneal administration of the targeting and therapeutic moieties provides the basis for enhanced therapeutic ratio, according to our strategy. We report here the results of an in vivo therapy using our RIT approach with the Balb/c nude mouse model xenografted with the NIH:OVCAR-3 (CA 125+) human ovarian cancer cell line. An ongoing tumor growth delay/control study in Balb/c mice xenografted intraperitoneally with the NIH:OVCAR-3 cell line indicates a significant delay in onset of tumor and ascites development in treated vs. control populations.
一种多步骤放射免疫治疗(RIT)方法，利用双特异性单克隆抗体(BsMAb)与90Y标记的生物素化长循环脂质体的组合，作为上皮性卵巢癌病的潜在辅助治疗进行了测试。具有抗ca 125和抗生物素表位的BsMAb与涂有生物素的聚乙二醇化脂质体一起使用，将细胞毒性放射性核素90Y递送到肿瘤部位。这种方法被用来克服与传统策略相关的一些主要障碍，特别是与传统的单克隆抗体(MAb)放射性核素递送相比，增加了传递到肿瘤部位的放射性量。根据我们的策略，靶向和治疗部分的顺序腹腔内给药为提高治疗比率提供了基础。我们在此报告了使用我们的RIT方法对移植了NIH:OVCAR-3 (CA 125+)人卵巢癌细胞系的Balb/c裸鼠模型进行体内治疗的结果。一项正在进行的肿瘤生长延迟/对照研究表明，在NIH:OVCAR-3细胞系的Balb/c小鼠腹腔内异种移植中，治疗组与对照组相比，肿瘤和腹水发展的发病明显延迟。
{"title":"Preliminary Results of Nanopharmaceuticals Used in the Radioimmunotherapy of Ovarian Cancer","authors":"S. McQuarrie, G. Miller, Mavanur R. Suresh, John R. Mercer","doi":"10.1109/ICMENS.2004.126","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.126","url":null,"abstract":"A multistep radioimmunotherapeutic (RIT) approach, exploiting the combination of a bispecific monoclonal antibody (BsMAb) with 90Y labelled biotinylated long-circulating liposomes was tested as a potential adjuvant treatment for epithelial ovarian carcinomatosis. The BsMAb, with anti-CA 125 and anti-biotin epitopes was used with PEGylated liposomes coated with biotin to deliver the cytotoxic radionuclide 90Y to tumor sites. This approach was used to overcome some of the major obstacles associated with conventional strategies, in particular, to increase the amount of radioactivity delivered to the tumor site compared with conventional monoclonal antibody (MAb) radionuclide delivery. Sequential intraperitoneal administration of the targeting and therapeutic moieties provides the basis for enhanced therapeutic ratio, according to our strategy. We report here the results of an in vivo therapy using our RIT approach with the Balb/c nude mouse model xenografted with the NIH:OVCAR-3 (CA 125+) human ovarian cancer cell line. An ongoing tumor growth delay/control study in Balb/c mice xenografted intraperitoneally with the NIH:OVCAR-3 cell line indicates a significant delay in onset of tumor and ascites development in treated vs. control populations.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"161 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121609637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nanoparticles such as metals, semiconductors and metal oxides are of great interest for a wide variety of applications in the field of information, energy, environmental and medical technologies due to their unique or improved properties determined primarily by size, composition and structure along with their self-organized film structures. In this presentation, Japan’s national project on nanoparticle synthesis and its applications in nanotechnology programs is reviewed along with some new findings on synthesis technologies and the related nanoparticle-based nano-structures developed during the project. The synthesis methods include liquid phase, gas phase, liquid-based gas phase such as novel spray methods and sol-gel assisted in-situ techniques and continuous mass production method.
{"title":"Nanoparticle Preparation and Its Application — A Nanotechnology Particle Project in Japan","authors":"K. Okuyama, W. Lenggoro, Toru Iwaki","doi":"10.1109/ICMENS.2004.108","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.108","url":null,"abstract":"Nanoparticles such as metals, semiconductors and metal oxides are of great interest for a wide variety of applications in the field of information, energy, environmental and medical technologies due to their unique or improved properties determined primarily by size, composition and structure along with their self-organized film structures. In this presentation, Japan’s national project on nanoparticle synthesis and its applications in nanotechnology programs is reviewed along with some new findings on synthesis technologies and the related nanoparticle-based nano-structures developed during the project. The synthesis methods include liquid phase, gas phase, liquid-based gas phase such as novel spray methods and sol-gel assisted in-situ techniques and continuous mass production method.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127769223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
With the development of microfluidic systems, there is a growing interest in micro scale laminar flow mixing. In this work, the fluid rotating angle and mixing efficiency in a micromixer with patterned grooves are studied as a function of the dimensions of the microstructure by numerical simulation. We found that mixing efficiency does not always increase with higher fluid stream rotation in the microchannel. High groove aspect ratios are not advantageous to fluid rotation. Experiments on mixture of two fluids were done on a micromixer fabricated in PDMS by replica molding. An 85% mixing efficiency was obtained in a 30mm long mixing channel with two dyed liquids.
{"title":"An Optimized Micromixer with Patterned Grooves","authors":"Yanghua Tang, Q. M. Wu, E. Czyzewska, K. Stanley","doi":"10.1109/ICMENS.2004.30","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.30","url":null,"abstract":"With the development of microfluidic systems, there is a growing interest in micro scale laminar flow mixing. In this work, the fluid rotating angle and mixing efficiency in a micromixer with patterned grooves are studied as a function of the dimensions of the microstructure by numerical simulation. We found that mixing efficiency does not always increase with higher fluid stream rotation in the microchannel. High groove aspect ratios are not advantageous to fluid rotation. Experiments on mixture of two fluids were done on a micromixer fabricated in PDMS by replica molding. An 85% mixing efficiency was obtained in a 30mm long mixing channel with two dyed liquids.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125458655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
To develop energy efficient microfluidic systems it is important to minimize the adhesion of the liquid to the surfaces in the system. One of the proposed methods in the literature is to use superhydrophobic surfaces, i.e. surfaces with contact angles above 150 degrees (for water). However, the issue that is not generally considered in depth in literature is the role of contact angle hysteresis (the difference between advancing and receding contact angles). In other words, to have an energy efficient droplet actuation system for microfluidics it is not sufficient to use surfaces that have large contact angles, but they also should have low contact angle hysteresis (CAH). Contact angle hysteresis is a common phenomenon in wetting. It is important but difficult to theoretically investigate CAR to optimally design superhydrophobic surfaces for micro-systems. We will present a universal approach to calculate CAR based on a free energy analysis for micro-textured surfaces. Thermodynamic status of contact angles and calculation of free the energy barrier are significantly simplified by using a representative 2D model instead of a 3D model with minimum loss of generality. A pillar surface structure is chosen as a typical example (see Figure 1). It is demonstrated that this approach can predict CAR and equilibrium contact angles that are consistent with predictions of Wenzel's and Cassie's equations. This approach can also provide a criterion for transition between noncomposite and composite structures (i.e. free spreading of liquids on a surface or achieving minimum contact area between a liquid drop and surfaces in a channel). Recent experimental results for wetting of superhydrophobic surfaces will also be discussed.
{"title":"Effect of Superhydrophobic Surfaces for Wetting in Micro-Systems","authors":"W. Li, R. Mohamadi, A. Amirfazli","doi":"10.1109/ICMENS.2004.58","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.58","url":null,"abstract":"To develop energy efficient microfluidic systems it is important to minimize the adhesion of the liquid to the surfaces in the system. One of the proposed methods in the literature is to use superhydrophobic surfaces, i.e. surfaces with contact angles above 150 degrees (for water). However, the issue that is not generally considered in depth in literature is the role of contact angle hysteresis (the difference between advancing and receding contact angles). In other words, to have an energy efficient droplet actuation system for microfluidics it is not sufficient to use surfaces that have large contact angles, but they also should have low contact angle hysteresis (CAH). Contact angle hysteresis is a common phenomenon in wetting. It is important but difficult to theoretically investigate CAR to optimally design superhydrophobic surfaces for micro-systems. We will present a universal approach to calculate CAR based on a free energy analysis for micro-textured surfaces. Thermodynamic status of contact angles and calculation of free the energy barrier are significantly simplified by using a representative 2D model instead of a 3D model with minimum loss of generality. A pillar surface structure is chosen as a typical example (see Figure 1). It is demonstrated that this approach can predict CAR and equilibrium contact angles that are consistent with predictions of Wenzel's and Cassie's equations. This approach can also provide a criterion for transition between noncomposite and composite structures (i.e. free spreading of liquids on a surface or achieving minimum contact area between a liquid drop and surfaces in a channel). Recent experimental results for wetting of superhydrophobic surfaces will also be discussed.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134218969","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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