Jonghae Kim, J. Plouchart, N. Zamdmer, M. Sherony, Liang-Hung Lu, Yue Tan, Meeyoung Yoon, K. Jenkins, Mahender Kumar, A. Ray, L. Wagner
{"title":"3-dimensional vertical parallel plate capacitors in an SOI CMOS technology for integrated RF circuits","authors":"Jonghae Kim, J. Plouchart, N. Zamdmer, M. Sherony, Liang-Hung Lu, Yue Tan, Meeyoung Yoon, K. Jenkins, Mahender Kumar, A. Ray, L. Wagner","doi":"10.1109/VLSIC.2003.1221153","DOIUrl":null,"url":null,"abstract":"This paper presents high-Q and high-density 3-dimensional VPP (vertical parallel plate) capacitors fabricated in a 0.12 /spl mu/m SOI CMOS technology. An effective capacitance density of 1.76 fF//spl mu/m/sup 2/ is obtained. A quality-factor of 22 at 1 GHz is obtained for a 20 pF VPP capacitor. Also, a VPP capacitor model is proposed for the first time to design the VPP capacitor.","PeriodicalId":270304,"journal":{"name":"2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408)","volume":"87 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"35","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2003 Symposium on VLSI Circuits. Digest of Technical Papers (IEEE Cat. No.03CH37408)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIC.2003.1221153","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 35
Abstract
This paper presents high-Q and high-density 3-dimensional VPP (vertical parallel plate) capacitors fabricated in a 0.12 /spl mu/m SOI CMOS technology. An effective capacitance density of 1.76 fF//spl mu/m/sup 2/ is obtained. A quality-factor of 22 at 1 GHz is obtained for a 20 pF VPP capacitor. Also, a VPP capacitor model is proposed for the first time to design the VPP capacitor.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
