{"title":"Design and Fabrication of Hybrid Lithium Niobate Electro-Optic Modulators","authors":"V. Mere, Forrest Valdez, S. Mookherjea","doi":"10.1109/ICEE56203.2022.10117674","DOIUrl":null,"url":null,"abstract":"A process for designing and fabricating hybrid lithium niobate Mach-Zehnder electro-optic modulators is described. The design uses unetched thin-film lithium niobate bonded to a foundry-fabricated chip containing planarized silicon nitride waveguides. We demonstrate 3-dB electro-optic bandwidth greater than 110 GHz and $\\mathrm{V}\\pi \\mathrm{L}$ of 2.4 V.cm, at 1310 nm wavelength.","PeriodicalId":281727,"journal":{"name":"2022 IEEE International Conference on Emerging Electronics (ICEE)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Emerging Electronics (ICEE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEE56203.2022.10117674","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
A process for designing and fabricating hybrid lithium niobate Mach-Zehnder electro-optic modulators is described. The design uses unetched thin-film lithium niobate bonded to a foundry-fabricated chip containing planarized silicon nitride waveguides. We demonstrate 3-dB electro-optic bandwidth greater than 110 GHz and $\mathrm{V}\pi \mathrm{L}$ of 2.4 V.cm, at 1310 nm wavelength.
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