Integrated microelectromechanical systems in the More than Moore era

Abstract

The classical IC integration roadmap has followed the Moore law for decades bringing up an impressive transistor scaling evolution resulting in a profound transformation of our quotidian practices. Current trends face the development of integrating multi-domain magnitudes within current systems, demanding a wider diversification of the parameters being managed and enabling what has been named as the More than Moore paradigm. The monolithic integration of such diversity of magnitudes is a challenge that will enable low-cost, highly complex personal systems. A view for the specific microelectromechanical domain will be shared.