A silicon-based yield gain evaluation methodology for embedded-SRAMs with different redundancy scenarios

E. Rondey, Yann Tellier, Simone Borri
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引用次数: 10

Abstract

Yield improvement is an essential issue for modem high-volume manufacturing CMOS processes. Process yield is particularly low for area-critical designs, such as embedded memories. The use of redundancy structures which replace faulty memory locations with good ones, has a direct impact on the final chip yield. This paper describes an experimental methodology employed to evaluate the yield gain associated with different redundancy approaches and shows how this method can be applied to determine the optimal redundancy configuration which maximizes the number of good dies per wafer, depending on the embedded memory requirements of a specific product.
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不同冗余场景下嵌入式sram的硅基良率增益评估方法
良率的提高是现代大批量生产CMOS工艺的关键问题。对于面积关键型设计,如嵌入式存储器,制程良率特别低。使用冗余结构将有缺陷的存储位置替换为良好的存储位置,对最终的芯片产量有直接影响。本文描述了一种用于评估与不同冗余方法相关的良率增益的实验方法,并展示了如何应用该方法来确定最佳冗余配置,该配置可根据特定产品的嵌入式存储器要求,最大限度地提高每片晶圆的好芯片数量。
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