Flexible display system based on MEMS Fabry-Perot interferometer

G. Tortissier, C. Lo, H. Fujita, H. Toshiyoshi
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Abstract

Previous works on MEMS actuated Fabry-Perot interferometer (FPI) highlighted promising results for flexible display applications. Three primary color pixels have indeed been obtained using both photolithography [1] and Roll-to-Roll printing process [2] with satisfying color purity and transmittance. However both of these processes are expensive and time-consuming for preparing master micropatterns. For these reasons, a new process based on inkjet printing has been set up. It contributes in a more ecological-friendly, high reproducible and fast process development while targeting improved features.
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基于MEMS法布里珀罗干涉仪的柔性显示系统
先前关于MEMS驱动法布里-珀罗干涉仪(FPI)的研究突出了柔性显示应用的前景。使用光刻[1]和卷对卷印刷工艺[2]确实获得了三个原色像素,并且具有令人满意的颜色纯度和透光率。然而,这两个过程对于准备主微模式都是昂贵且耗时的。基于这些原因,建立了一种基于喷墨打印的新工艺。它有助于更环保,高可重复性和快速的过程开发,同时针对改进的功能。
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