Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers

Abstract

We study the optical performances of microring resonator modulators fabricated on 200 mm SOI wafers to select the ring resonator modulators for targeted ONoC and optical interposer applications. Counter-doped ring resonator modulators were fabricated to guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive fabrication steps. The fabricated add-drop ring resonator modulators showed good DC performances with a VπL at 1.55 V.cm. Finally, ultra-low loss waveguides were realized to allow long distance data transport on photonic chips.