In-depth analysis of self-heating effects in vertical nanoplate-shaped GAAFETs

Dokyun Son, Ilho Myeong, Hyunsuk Kim, Myounggon Kang, Hyungcheol Shin
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Abstract

Self-heating effects (SHEs) were studied on the vertical nanoplate-shaped gate-all-around (GAA) FETs (vNPFETs) as a target of 5nm node technology. The thermal properties are compared between face-up and face-down configuration. Decreasing the channel width is vulnerable to both configurations in terms of SHEs due to the reduced area of heat dissipation. It is well known that the SHE is alleviated on AC condition, while our results show that the SHE is still important in vNPFET on AC condition.
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垂直纳米板形gaafet自热效应的深入分析
以5nm节点技术为目标,研究了垂直纳米板状栅极全能(GAA)场效应管(vnpfet)的自热效应(SHEs)。比较了面朝上和面朝下结构的热性能。由于散热面积的减少,减小通道宽度对两种配置的she都是脆弱的。众所周知,在交流条件下,SHE得到了缓解,而我们的研究结果表明,在交流条件下,SHE在vNPFET中仍然很重要。
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