InGaAs/InP avalanche photodiodes with a thin multiplication layer

D. Haško, F. Uherek, F. Mika
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引用次数: 3

Abstract

We report on the design and characterization of a low-noise and low voltage InGaAs/InP avalanche photodiode (APD) grown by metalorganic chemical vapour deposition (MOCVD). The investigated InGaAs/InP APD structure for lightwave transmission systems consists of separate absorption InGaAs, charge InP and InP multiplication layers (SACM). The designed APD without a guard ring exhibits a dark current less than 5 /spl mu/A near the breakdown voltage (V/sub B/ /spl ap/ 48 V). External quantum efficiency >75% (at /spl lambda/ = 1300 nm), avalanche gain up to 5 and capacitance lower than 1.1 pF at the operating voltage were achieved. The measured temperature dependence of current-voltage characteristics, capacitance-voltage and spectral characteristics are presented.
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具有薄倍增层的InGaAs/InP雪崩光电二极管
本文报道了一种金属有机化学气相沉积(MOCVD)制备的低噪声、低电压InGaAs/InP雪崩光电二极管(APD)的设计与表征。所研究的用于光波传输系统的InGaAs/InP APD结构由独立吸收InGaAs、电荷InP和InP倍增层(SACM)组成。所设计的无保护环APD在击穿电压(V/sub / B/ /spl / ap/ 48 V)附近的暗电流小于5 /spl mu/ a,外量子效率>75% (at /spl λ / = 1300 nm),雪崩增益高达5,工作电压下电容低于1.1 pF。给出了测量温度对电流-电压特性、电容-电压特性和光谱特性的依赖关系。
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