New Quantitative Measurements of IC Stress Introduced by Plastic Packages

James L. Spencer, Walter Ff. Schroen, G. Bednarz, John A. Bryan, Terry D. Metzgar, Robert D. Cleveland, D. Edwards
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引用次数: 53

Abstract

New strain gauge test bars have been designed forming individual and bridge structures for silicon integrated circuits. They are used to quantitatively measure internal stress introduced in IC bars during packaging. The results show that unexpectedly high levels of stress are introduced as a function of plastic material selection as well as mold and cure temperatures of the materials. The stress can be reduced, and process control can be tightened by appropriate choice of packaging conditions. The importance for IC reliability and electrical performance is discussed.
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塑料封装引入集成电路应力定量测量新方法
为硅集成电路设计了新的应变片试验杆,形成了独立结构和桥式结构。它们用于定量测量集成电路棒在封装过程中引入的内应力。结果表明,由于塑料材料的选择以及材料的模具和固化温度,引入了意想不到的高应力水平。通过适当选择包装条件,可以减少应力,并加强过程控制。讨论了集成电路可靠性和电气性能的重要性。
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