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Mechanisms of Temperature Cycle Failure in Encapsulated Optoelectronic Devices 封装光电器件温度循环失效机理研究
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362987
J. Uebbing
One of the key reliability limitations of low cost encapsulated optoelectronic devices has been temperature cycling. This is because the clear polymers used to encapsulate the devices have expansion coefficients significantly greater than the devices to be encapsulated. This mismatch causes thermal stresses and cyclical stress causes low cycle fatigue failure.1 In this paper we show how the use of log-normal plots of the failure rate allows ready comparison of different device types and structures, extrapolation to different stress conditions and the examination of the statistical significance of the results. Two types of stress condition are distinguished, polymer motion and polymer force. In the polymer motion mode, the polymer portion is large and stiff compared to the rest of the device. In the polymer force mode, the polymer is small and/or soft compared to the device. In terms of device design, the two things that affect the mode and the temperature cycle reliability are structure and materials. In the structures area, a series of comparisons between elastic stress theory and observed failure rates is done for different device geometries. Stress concentrations around ceramic substrates, bending forces on ceramic substrates, stress concentrations around stiff lead frames, stress in wire loops and kink formation in gold wire are all examined. An integrated model for certain failure modes is proposed. In the materials area, the benefits of soft silicones and so-called magic epoxes are presented.
低成本封装光电器件可靠性的关键限制之一是温度循环。这是因为用于封装器件的透明聚合物具有明显大于被封装器件的膨胀系数。这种不匹配导致热应力和循环应力导致低循环疲劳失效在本文中,我们展示了故障率的对数正态图的使用如何允许不同设备类型和结构的现成比较,外推到不同的应力条件和结果的统计显著性的检查。将聚合物运动应力和聚合物力应力区分为两种应力状态。在聚合物运动模式下,与装置的其余部分相比,聚合物部分大而硬。在聚合物力模式下,与装置相比,聚合物是小的和/或软的。在器件设计方面,影响模态和温度循环可靠性的两个因素是结构和材料。在结构领域,对不同器件几何形状的弹性应力理论和观察到的故障率进行了一系列比较。陶瓷基板周围的应力集中,陶瓷基板上的弯曲力,硬引线框架周围的应力集中,线圈中的应力和金线中的扭结形成都进行了检查。提出了针对某些失效模式的综合模型。在材料领域,介绍了软硅树脂和所谓的神奇环氧树脂的优点。
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引用次数: 9
A Method of Detecting Hot Spots on Semiconductors using Liquid Crystals 一种利用液晶检测半导体上热点的方法
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362984
J. Hiatt
This paper presents a failure analysis technique which uses cholesteric liquid crystals and polarized light to locate areas of high power dissipation on an integrated circuit. The technique is non-destructive and can be performed in a few minutes using common failure analysis equipment. An example is given involving the analysis of a CMOS latch-up mechanism.
本文提出了一种利用胆甾液晶和偏振光定位集成电路高功耗区域的失效分析技术。该技术是非破坏性的,可以在几分钟内完成,使用常见的故障分析设备。给出了一个分析CMOS闭锁机构的例子。
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引用次数: 53
Highly Accelerated Temperature and Humidity Stress Test Technique (HAST) 高加速温度和湿度应力测试技术
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362972
J. E. Gunn, Sushil K. Malik, Purabi M. Mazumdar
A method for highly accelerated bias-temperature humidity stress testing is described. This method allows testing in the regime 100°C/175°C and 50% R.H./85% R.H. Experimental results which demonstrate invariance of corrosion failure modes and lognormal sigmas under different high temperature-humidity conditions are presented. Acceleration factors relative to 85°C/81% R.H. and 60°C/81% R.H. stress tests are given.
介绍了一种高加速偏温湿度应力试验方法。该方法允许在100°C/175°C和50% R.H./85% R.H.条件下进行测试。实验结果表明,在不同的高温湿度条件下,腐蚀失效模式和对数正态西格玛是不变的。给出了相对于85°C/81% R.H.和60°C/81% R.H.应力试验的加速度因子。
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引用次数: 57
Monte Carlo Calculations Based on the Generalized Electromigration Failure Model 基于广义电迁移失效模型的蒙特卡罗计算
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362992
K. Nikawa
The dependence of electromigration failure-time on line width and current density was studied using Monte Carlo calculations. In constructing the model used here, A total of three factors were considered: the metallurgical properties of the film, the thermal process during failure propagation, and the stress induced mass flow. In the study on line width dependence, median time to failure (t50) was revealed to decrease as line width decreased to about median grain size, and to increase steeply as the line width decreased further, in good agreement with previous experiments. A wide variety of values assigned to an exponential factor (n) in current density dependence of t50 (t50¿ J-n) was successfully explained by introducing the effective length where a stress gradient has built up.
采用蒙特卡罗计算方法研究了电迁移失效时间与线宽和电流密度的关系。在构建此模型时,共考虑了三个因素:薄膜的冶金性能、失效传播过程中的热过程以及应力诱导的质量流。在线宽依赖性研究中,中位失效时间(t50)随着线宽减小至约中位晶粒尺寸而减小,随着线宽进一步减小而急剧增大,与前人的实验结果吻合较好。在t50 (t50¿J-n)的电流密度依赖性中,指数因子(n)的各种值被成功地通过引入应力梯度建立的有效长度来解释。
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引用次数: 27
The use of Silicone RTV Rubber for Alpha Particle Protection on Silicon Integrated Circuits 硅RTV橡胶在硅集成电路α粒子保护中的应用
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362971
M. L. White, J. Serpiello, K. Striny, W. Rosenzweig
Alpha particle sensitive static RAMs have been shielded from externally emitted radiation with a coating of silicone RTV (Room Temperature Vulcanizing) rubber. This material, which was determined to have an average alpha activity of .0010 cm¿2hr¿1 in the 2-8 Mev range is applied to chips in a hermetic package. The RTV rubber does not affect the sealing yield or reliability of the packages. Devices with this coating were operated error-free for 106 device hours.
α粒子敏感的静态ram已经屏蔽了外部发射的辐射与硅树脂RTV(室温硫化)橡胶涂层。这种材料在2-8 Mev范围内的平均α活度为0.0010 cm¿2hr¿1,适用于密封封装中的芯片。RTV橡胶不影响封装的密封性和可靠性。具有该涂层的器件在106个器件小时内无差错运行。
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引用次数: 8
Dynamics of Charge Collection from Alpha-Particle Tracks in Integrated Circuits 集成电路中α粒子轨迹的电荷收集动力学
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362970
C. Hsieh, P. Murley, R. R. O'Brien
We studied the transient characteristics of charge collection from alpha-particle tracks in silicon devices. We have run computer calculations using the finite element method, in parallel with experimental work. When an alpha particle penetrates a pn-junction, the generated carriers drastically distort the junction field. After alpha particle penetration, the field, which was originally limited to the depletion region, extends far down into the bulk silicon along the length of the alpha-particle track and funnels a large number of carriers into the struck junction. After less than one nanosecond, the field recovers to its position in the normal depletion layer, and, if the track is long enough, a residue of carriers is left to be transported by diffusion. The extent of this field funneling is a function of substrate concentration, bias voltage, and the alpha-particle energy.
我们研究了硅器件中粒子轨迹电荷收集的瞬态特性。在进行实验工作的同时,我们用有限元法进行了计算机计算。当α粒子穿透pn结时,产生的载流子会剧烈地扭曲结场。在α粒子穿透后,原本局限于耗尽区的电场沿着α粒子轨迹的长度向下延伸到体硅中,并将大量载流子输送到被击中的结中。在不到一纳秒的时间内,电场恢复到正常耗尽层的位置,如果轨迹足够长,残余的载流子就会通过扩散运输。这种场漏斗的程度是衬底浓度、偏置电压和α粒子能量的函数。
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引用次数: 85
Reliability Aspects of a Floating Gate E2 PROM 浮动栅E2 PROM的可靠性分析
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362965
B. Euzent, N. Boruta, J. Lee, C. Jenq
This paper has discussed a number of E2PROM failure mechanisms for both erase/write cycling and data retention. It has been shown that Fowler-Nordheim tunneling used for programming does not affect data retention. Erase/write cycling has been shown to degrade device margins by only a small amount and is easily guardbanded. Erase/write cycling does contribute to a significant portion of the observed failure rate due to oxide breakdown under high field operation. Defect related charge loss has been shown to be similar to that observed in EPROMs. Finally, it has been shown that E2PROMs can perform reliably in applications requiring up to 10,000 erase/write cycles per byte.
本文讨论了擦除/写循环和数据保留的一些E2PROM故障机制。已经证明,用于编程的Fowler-Nordheim隧道并不影响数据保留。擦除/写循环已被证明只会降低设备的边际,并且很容易被保护。在高强度现场操作下,由于氧化物击穿,擦除/写入循环确实导致了观察到的故障率的很大一部分。与缺陷相关的电荷损失与在eprom中观察到的情况相似。最后,已经证明e2prom可以在每字节需要多达10,000个擦除/写周期的应用程序中可靠地执行。
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引用次数: 27
A Three-Fold Increase in Current Carrying Capability of Al-Cu Metallurgy by Pre-Depositing a Suitable Underlay Material 预镀合适的衬底材料可使铝铜冶金的载流能力提高三倍
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.363003
J. Jaspal, H. Dalal
To achieve the desired Cr-Cr202/Al-Cu laminate chip metalization, first Cr is deposited with the evaporation chamber back-filled with water vapor to a partial pressure of 1 to 4 × 10¿3 Pa. This is followed by standard Al Cu evaporation, lift-off or subetch, sinter, and insulation processing. The critical process step of bleeding in water vapor during Cr evaporation has to be maintained at an optimum because too much Cr202 will lead to high contact resistance and too little Cr202 will lead to a loss of diffusion barrier effectiveness. It is during the sintering cycle that 'Cr' diffusion into the Al-Cu metallization structure occurs along with formation of limited amounts of Al2O03 TThe presence of Al and Cr oxides in turn limits the formation of Cr and Al intermetallics. This results in an acceptable sheet resistance of the metallization structure. Accelerated testing of interconnecting stripes and various sizes of metal contacts to resistor and transistor devices at different temperature and current levels has been completed. As for Al-Cu metallization test results for Cr-Cr203/Al-Cu can be represented by tf J¿n exp(¿H ÷ kT) where J is the current density, T is the temperature, k is the Boltzman constant, ¿H is the activation energy and n is the current exponent. Thus at constant temperature J2 = J1 × (tf1 ÷ tf2)1/n and since for Cr-Cr203/Al-Cu metallurgy the testing done supports an improvement in electromigration lifetime of 1OX, an activation energy of 0.
为了实现理想的Cr- cr202 /Al-Cu层压片金属化,首先将Cr沉积在蒸发室中,蒸发室中回灌水蒸气,分压为1至4 × 10¿3 Pa。接下来是标准的铝铜蒸发、提离或分段、烧结和绝缘处理。由于Cr202过多会导致接触电阻过高,而Cr202过少则会导致扩散屏障效果的丧失,因此必须将Cr蒸发过程中水蒸气放血的关键工艺步骤保持在最佳状态。在烧结过程中,“Cr”扩散到Al- cu金属化结构中,同时形成少量的al2o3,而Al和Cr氧化物的存在又限制了Cr和Al金属间化合物的形成。这导致了金属化结构的可接受的薄片电阻。完成了电阻和晶体管器件在不同温度和电流水平下的互连条纹和各种尺寸金属触点的加速测试。Cr-Cr203/Al-Cu的Al-Cu金属化试验结果可以用tf J¿n exp(¿H ÷ kT)表示,其中J为电流密度,T为温度,k为玻尔兹曼常数,¿H为活化能,n为电流指数。因此,在恒温条件下,J2 = J1 × (tf1 ÷ tf2)1/n,并且由于对Cr-Cr203/Al-Cu冶金所做的测试支持电迁移寿命提高到10x,活化能为0。
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引用次数: 2
The Effect of Insulation Coatings on Forward Beta Degradation in Bipolar Transistors 绝缘涂层对双极晶体管正向β衰减的影响
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.363006
S. Zalar
Uncoated, SiO2-coated, and polyimide-coated NPN discrete bipolar transistors were subjected to forward life stressing at temperatures between 100°C and 200°C, and at stress current densities in metal lines between 0.2 and 0.8 × 106 A/cm2. The changes of current gain (beta) in these transistors were monitored as the function of stress time up to 1000 hours. Beta degradation in uncoated transistors started immediately. Later, however, when the mechanical stress generated by electromigration reached the yield point of CrAlCu metallurgy in the emitter area, the beta showed a strong recovery to values about 10% higher than the beta at time zero. This explanation was corroborated by the observation of extrusions in the scanning electron microscope. The overlayer of 2.4 ¿m of sputtered SiO2 strongly retarded the beginning of beta degradation but did not prevent it toward the end of life stressing. The overlayer of 2.7 ¿m of spun-on polyimide initially had a negligible effect on the beginning of beta degradation. Later, however, when the yield point of metallurgy was achieved, the polyimide seemed to partially block the extrusion of hillocks and prevented the recovery of beta. This was confirmed by SEM photography. The experiment verified the basic premise that the forward beta degradation in bipolar transistors can be described in terms of the mechanical stress generated by electromigration in the emitter region.
未涂覆、sio2涂覆和聚酰胺涂覆的NPN离散双极晶体管在100°C至200°C的温度和0.2至0.8 × 106 A/cm2的金属线应力电流密度下承受正向寿命应力。这些晶体管的电流增益(beta)的变化作为应力时间的函数被监测到1000小时。未涂覆晶体管的Beta退化立即开始。然而,当电迁移产生的机械应力在发射极区域达到CrAlCu冶金的屈服点时,β表现出强劲的恢复,比时间零时的β高约10%。在扫描电子显微镜下对挤压物的观察证实了这一解释。2.4¿m的溅射SiO2覆盖层强烈地延缓了β降解的开始,但没有阻止它走向寿命应力的结束。2.7 m的自旋聚酰亚胺覆盖层最初对β降解的开始影响可以忽略不计。然而,后来,当达到冶金的屈服点时,聚酰亚胺似乎部分地阻止了丘的挤压,并阻止了β的恢复。SEM摄影证实了这一点。实验验证了双极晶体管的正向退化可以用发射极区电迁移产生的机械应力来描述的基本前提。
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引用次数: 0
Reliability of DH Ga1-XAlX As LEDs For Lightwave Communications 用于光波通信的DH - Ga1-XAlX led的可靠性
Pub Date : 1981-04-07 DOI: 10.1109/IRPS.1981.362983
C. Zipfel, A. Chin, V. Keramidas, R. H. Saul
Double heterostructure Gal-xAlXAs LEDs operated at high current densities (3 × 103 A/cm2) are being used as sources in lightwave communication systems, for example in optical data links. This paper discusses the reliability of these devices, distinguishing between catastrophic degradation due to Dark Line Defect (DLD) formation and gradual aging mechanisms. Two modes of DLD formation are observed: (1) A certain percentage of devices fail in relatively short times by DLD formation at threading dislocations. The growth of these DLDs is strongly current dependent, but independent of temperature. A 100h, 100 mA burn-in eliminates all of the devices which fail by this mode. Burn-in failures can be kept as low as 5%. (2) Under accelerated aging as many as 25% of the devices which passed the burn-in fail after 103h by a new mode of DLD formation. This mode is temperature dependent and related to stress at the dielectric-metal interface. Analysis shows that a 25% freak population gives ¿40 FITS at 70°C. Accelerated aging studies of clear devices are complicated by two competing processes: a slow degradation in light output and a slow increase which dominates at high temperatures. Activation energies for the two processes are 0.65 and 0.75 eV, respectively. Projected values of MTTF are 9 × 107h at 25°C and 4 × 106h at 70°C.
双异质结构Gal-xAlXAs led在高电流密度(3 × 103 A/cm2)下工作,被用作光波通信系统的光源,例如光学数据链路。本文讨论了这些器件的可靠性,区分了由于暗线缺陷(DLD)形成的灾难性退化和逐渐老化机制。观察到DLD形成的两种模式:(1)在螺纹位错形成DLD时,一定比例的器件在相对较短的时间内失效。这些dld的生长强烈依赖于电流,但与温度无关。100小时,100毫安的老化消除了所有在这种模式下失效的设备。老化失败率可以保持在5%以下。(2)在加速老化条件下,采用新的DLD形成方式,103h后通过老化的器件失效率高达25%。这种模式与温度有关,并与介电-金属界面处的应力有关。分析表明,25%的畸形人群在70°C时给出了¿40 FITS。透明器件的加速老化研究由于两个相互竞争的过程而变得复杂:光输出的缓慢退化和在高温下占主导地位的缓慢增加。两个过程的活化能分别为0.65和0.75 eV。MTTF的预估值在25°C时为9 × 107h,在70°C时为4 × 106h。
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引用次数: 4
期刊
19th International Reliability Physics Symposium
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