Jaeyong An, Jisung Hur, Sung-Kil Lee, Jong-Hyun Lee
{"title":"Eye-shaped coplanar variable liquid lens using spherical polymer encapsulation","authors":"Jaeyong An, Jisung Hur, Sung-Kil Lee, Jong-Hyun Lee","doi":"10.1109/OMEMS.2010.5672207","DOIUrl":null,"url":null,"abstract":"An eye-shaped coplanar liquid lens was fabricated using spherical polymer encapsulation to enhance the focusing power. For the spherical encapsulation, a thin film polymer layer was deposited by chemical vapor deposition on an outer surface of the top liquid. Polymer thin film (parylene) encapsulation with coplanar structure provides a unique advantage of wafer level packaging of liquid lens and convenient accessibility of the electrical signal. The fabricated variable liquid lens with an initial focal length of 35mm was tuned up to 12mm at Vrms 70 V.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672207","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
An eye-shaped coplanar liquid lens was fabricated using spherical polymer encapsulation to enhance the focusing power. For the spherical encapsulation, a thin film polymer layer was deposited by chemical vapor deposition on an outer surface of the top liquid. Polymer thin film (parylene) encapsulation with coplanar structure provides a unique advantage of wafer level packaging of liquid lens and convenient accessibility of the electrical signal. The fabricated variable liquid lens with an initial focal length of 35mm was tuned up to 12mm at Vrms 70 V.
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