Highly selective and sensitive gas sensors for exhaled breath analysis using CuBr thin film

S. Momose, Kazuaki Karasawa, M. Ushigome, R. Takasu, O. Tsuboi
{"title":"Highly selective and sensitive gas sensors for exhaled breath analysis using CuBr thin film","authors":"S. Momose, Kazuaki Karasawa, M. Ushigome, R. Takasu, O. Tsuboi","doi":"10.1109/NEMS.2016.7758262","DOIUrl":null,"url":null,"abstract":"We have examined a p-type semi-conductor CuBr thin film used for sensor devices that indicates the order of sensitivity to ammonia in parts per billion (ppb). The CuBr thin film also indicates excellent selectivity to ammonia among reductive gases, which additionally suggests its capacity for fast quantification of the order of seconds. Moreover, CuBr thin film can be adapted to a high-sensitivity aldehyde sensor by a surface modification. Since the fabrication process of CuBr thin film is compatible with an ordinal CMOS process, there is a potential for development into highly integrated and low power consumption sensor devices. These properties make CuBr thin film a promising candidate as a gas sensing material for human-breath analysis.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2016.7758262","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

We have examined a p-type semi-conductor CuBr thin film used for sensor devices that indicates the order of sensitivity to ammonia in parts per billion (ppb). The CuBr thin film also indicates excellent selectivity to ammonia among reductive gases, which additionally suggests its capacity for fast quantification of the order of seconds. Moreover, CuBr thin film can be adapted to a high-sensitivity aldehyde sensor by a surface modification. Since the fabrication process of CuBr thin film is compatible with an ordinal CMOS process, there is a potential for development into highly integrated and low power consumption sensor devices. These properties make CuBr thin film a promising candidate as a gas sensing material for human-breath analysis.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
高选择性和敏感的气体传感器,用于呼气分析,使用cur薄膜
我们已经检查了用于传感器设备的p型半导体cur薄膜,该薄膜表明对氨的灵敏度以十亿分之一(ppb)为单位。在还原性气体中,cur薄膜对氨具有很好的选择性,这也表明它具有秒级的快速定量能力。此外,通过表面改性,cur薄膜可以适应高灵敏度的醛传感器。由于cur薄膜的制造工艺与有序CMOS工艺兼容,因此具有向高集成度和低功耗传感器器件发展的潜力。这些特性使cur薄膜成为一种很有前途的候选气体传感材料,用于人体呼吸分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
MEMS artificial neuromast arrays for hydrodynamic control of soft-robots In-situ cellular-scale injection for alive plants by micro-bubble injector High-throughput injection by circulating plasma-bubbles laden flows Development of a simple fabrication process for a printable piezoelectric energy harvest device A three-dimensional microfluidic device for oocyte zona-removal and incubation
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1