Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758314
Ching-Wen Yu, Lien-Yu Hung, C. Fu, Chih-Hung Wang, N. Chiang, Yu-Chun Wang, Y. Shan, Gwo-Bin Lee
Cholangiocarcinoma (CCA) is a cancer of bile duct, which possesses a high mortality rate and poor prognosis owing to its difficulties in early diagnosis and a lack of effective treatment. To improve the clinical detection, one of promising approaches is to find specific biomarkers to detect CCA cells. However, the existing screening processes are usually time-consuming and lab-intensive. In this study, an integrated microfluidic system was proposed to perform on-chip phage display for selection of specific peptides that could identify CCA cell lines. The results showed that we could perform one panning round within 6 hours and the whole processes could be automated. This microfluidic system may be a powerful tool for screening of affinity agents in the clinical diagnosis and target therapeutics for CCA.
{"title":"An integrated microfluidic system for screening of peptides specific to cholangiocarcinoma (CCA) cancer cell lines using the phage display technology","authors":"Ching-Wen Yu, Lien-Yu Hung, C. Fu, Chih-Hung Wang, N. Chiang, Yu-Chun Wang, Y. Shan, Gwo-Bin Lee","doi":"10.1109/NEMS.2016.7758314","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758314","url":null,"abstract":"Cholangiocarcinoma (CCA) is a cancer of bile duct, which possesses a high mortality rate and poor prognosis owing to its difficulties in early diagnosis and a lack of effective treatment. To improve the clinical detection, one of promising approaches is to find specific biomarkers to detect CCA cells. However, the existing screening processes are usually time-consuming and lab-intensive. In this study, an integrated microfluidic system was proposed to perform on-chip phage display for selection of specific peptides that could identify CCA cell lines. The results showed that we could perform one panning round within 6 hours and the whole processes could be automated. This microfluidic system may be a powerful tool for screening of affinity agents in the clinical diagnosis and target therapeutics for CCA.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133250026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758304
Yuki Kamata, D. Yoon, T. Sasaki, Y. Nozaki, S. Yamaura, T. Sekiguchi, T. Nakajima, S. Shoji
This paper presents a simple printing process to design a novel piezoelectric energy harvest device made from (VDF/TrFE) copolymers. The fabrication process using metal nano-ink and a household printer dramatically reduced the fabrication complexity. Additionally, this process employed low temperatures and thus the structural damage of the polymers resulting from high temperature annealing could be avoided. An electric power of about 0.06 μJ was generated using this device.
{"title":"Development of a simple fabrication process for a printable piezoelectric energy harvest device","authors":"Yuki Kamata, D. Yoon, T. Sasaki, Y. Nozaki, S. Yamaura, T. Sekiguchi, T. Nakajima, S. Shoji","doi":"10.1109/NEMS.2016.7758304","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758304","url":null,"abstract":"This paper presents a simple printing process to design a novel piezoelectric energy harvest device made from (VDF/TrFE) copolymers. The fabrication process using metal nano-ink and a household printer dramatically reduced the fabrication complexity. Additionally, this process employed low temperatures and thus the structural damage of the polymers resulting from high temperature annealing could be avoided. An electric power of about 0.06 μJ was generated using this device.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126218959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758300
A. Kottapalli, M. Asadnia, Z. Shen, V. Subramaniam, J. Miao, M. Triantafyllou
In this work, we present the development and experimental testing of two types of bio-inspired MEMS sensors - piezoresistive all-polymer sensors that perform steady-state flow sensing analogous to the superficial neuromasts (SNs), and piezoelectric pressure sensors which perform hydrodynamic oscillatory flow sensing similar to the canal neuromasts (CNs). Real-time underwater sensing applications of these sensors in performing hydrodynamic flow sensing to achieve improved control of soft robots is demonstrated. Experiments conducted on lab-version of a robotic stingray and a robotic fishtail validate the arrays' ability in accurately detecting the propagation velocity and flapping hydrodynamics of the robots. Experiments conducted on a kayak show that the sensors detect vortex-shedding signatures that could provide cues towards achieving energy-efficient maneuvers.
{"title":"MEMS artificial neuromast arrays for hydrodynamic control of soft-robots","authors":"A. Kottapalli, M. Asadnia, Z. Shen, V. Subramaniam, J. Miao, M. Triantafyllou","doi":"10.1109/NEMS.2016.7758300","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758300","url":null,"abstract":"In this work, we present the development and experimental testing of two types of bio-inspired MEMS sensors - piezoresistive all-polymer sensors that perform steady-state flow sensing analogous to the superficial neuromasts (SNs), and piezoelectric pressure sensors which perform hydrodynamic oscillatory flow sensing similar to the canal neuromasts (CNs). Real-time underwater sensing applications of these sensors in performing hydrodynamic flow sensing to achieve improved control of soft robots is demonstrated. Experiments conducted on lab-version of a robotic stingray and a robotic fishtail validate the arrays' ability in accurately detecting the propagation velocity and flapping hydrodynamics of the robots. Experiments conducted on a kayak show that the sensors detect vortex-shedding signatures that could provide cues towards achieving energy-efficient maneuvers.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114111302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758216
Chuan Chang, Yueh-Jen Chen, L. Pan, F. Tseng
To solve the low implantation rate of in-vitro fertilization (IVF), zona-free oocyte is widely used in IVF. However the process of zona-removal is not only tedious but also easy to harm the fragile oocyte. In this work we introduce a 3-dimensional microfluidic device to simplify the zona-removal process, and the applied gentle process is also capable to keep oocyte intact and precisely locate all oocytes in the well throughout the procedure.
{"title":"A three-dimensional microfluidic device for oocyte zona-removal and incubation","authors":"Chuan Chang, Yueh-Jen Chen, L. Pan, F. Tseng","doi":"10.1109/NEMS.2016.7758216","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758216","url":null,"abstract":"To solve the low implantation rate of in-vitro fertilization (IVF), zona-free oocyte is widely used in IVF. However the process of zona-removal is not only tedious but also easy to harm the fragile oocyte. In this work we introduce a 3-dimensional microfluidic device to simplify the zona-removal process, and the applied gentle process is also capable to keep oocyte intact and precisely locate all oocytes in the well throughout the procedure.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128102099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758218
Keishi Ohtonari, Y. Arakawa, Hiroki Ogata, Daisuke Tujimoto, Y. Yamanishi
We have succeeded in injection of plasmid to adherent cells which are suspended in the plasma-bubbles laden circulation flow in a chamber. High-speed plasma-bubbles are generated by glass electrode and the air-liquid interface has a stiction force which draws the gene (plasmid) and stick to the air-liquid interface. The circulating flow increased the chances for cells to contact air-liquid interface of bubbles which is enclosing plasma or reactive gas. Finally, the high reactive interface enables gene transfer to cells efficiently. This proposed two dimensional microfluidic chip contributes to high-throughput gene transfer in bio-medical applications.
{"title":"High-throughput injection by circulating plasma-bubbles laden flows","authors":"Keishi Ohtonari, Y. Arakawa, Hiroki Ogata, Daisuke Tujimoto, Y. Yamanishi","doi":"10.1109/NEMS.2016.7758218","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758218","url":null,"abstract":"We have succeeded in injection of plasmid to adherent cells which are suspended in the plasma-bubbles laden circulation flow in a chamber. High-speed plasma-bubbles are generated by glass electrode and the air-liquid interface has a stiction force which draws the gene (plasmid) and stick to the air-liquid interface. The circulating flow increased the chances for cells to contact air-liquid interface of bubbles which is enclosing plasma or reactive gas. Finally, the high reactive interface enables gene transfer to cells efficiently. This proposed two dimensional microfluidic chip contributes to high-throughput gene transfer in bio-medical applications.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"218 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121731281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758324
Sohei Itabashi, T. Kambayashi, Takatoshi Shimamura, Kazuki Takahashi, Y. Yamanishi
We have succeeded in local and in-situ injection of reagent into a single plant cell by using the cavitation phenomenon of micro-bubbles. Micro-bubbles were generated electrically by a novel device called “micro-bubble injector”. This novel technology provides minimally invasive processing and high accessibility compared to conventional injection techniques which enable to inject to the material which have been difficult to be injected for a long time. This technology contribute to the biological and medical researches developments.
{"title":"In-situ cellular-scale injection for alive plants by micro-bubble injector","authors":"Sohei Itabashi, T. Kambayashi, Takatoshi Shimamura, Kazuki Takahashi, Y. Yamanishi","doi":"10.1109/NEMS.2016.7758324","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758324","url":null,"abstract":"We have succeeded in local and in-situ injection of reagent into a single plant cell by using the cavitation phenomenon of micro-bubbles. Micro-bubbles were generated electrically by a novel device called “micro-bubble injector”. This novel technology provides minimally invasive processing and high accessibility compared to conventional injection techniques which enable to inject to the material which have been difficult to be injected for a long time. This technology contribute to the biological and medical researches developments.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121633851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-11-28DOI: 10.1109/NEMS.2016.7758215
Yueh-Jen Chen, R. Wu, Peng-Chun Chen, Yu-Nan Lin, H. Hsiu, Ching-Chu Yen, Chia-Woei Wang, L. Pan, F. Tseng
This paper proposes a selection and extraction strategy to acquire high quality sperms from a biomimetic microfluidic device capable of generating a dual gradient flow field for motile sperm sorting. The sorter consists of a straight flow zone, a rapidly expansion sector for sperm sorting by gradient up-stream flow, and a dumbbell channel for dead sperms separation at the outlet. A collateral runner is set at the front area of the expansion sector, but mostly kept in dry state without affecting the sorting process. At the end of sorting, a pressure was applied from both the inlet and outlet to flush the high quality sperms into the collateral runner for collection. Controllable numbers, ranging from 1 to 15000, of sperms can be collected with a motility (>60μm) ratio higher than 60%, suitable for in-vitro fertilization (IVF).
{"title":"Hydraulic extraction of high quality sperms from a dual gradient sperm sorter for in-vitro fertilizatio","authors":"Yueh-Jen Chen, R. Wu, Peng-Chun Chen, Yu-Nan Lin, H. Hsiu, Ching-Chu Yen, Chia-Woei Wang, L. Pan, F. Tseng","doi":"10.1109/NEMS.2016.7758215","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758215","url":null,"abstract":"This paper proposes a selection and extraction strategy to acquire high quality sperms from a biomimetic microfluidic device capable of generating a dual gradient flow field for motile sperm sorting. The sorter consists of a straight flow zone, a rapidly expansion sector for sperm sorting by gradient up-stream flow, and a dumbbell channel for dead sperms separation at the outlet. A collateral runner is set at the front area of the expansion sector, but mostly kept in dry state without affecting the sorting process. At the end of sorting, a pressure was applied from both the inlet and outlet to flush the high quality sperms into the collateral runner for collection. Controllable numbers, ranging from 1 to 15000, of sperms can be collected with a motility (>60μm) ratio higher than 60%, suitable for in-vitro fertilization (IVF).","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132670834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-17DOI: 10.1109/NEMS.2016.7758319
W. Kao, C. Chu, Wen-Hsin Chang, Yu-Lin Wang, Gwo-Bin Lee
Rapid and accurate diagnosis of C-reactive protein (CRP) is crucial for monitoring cardiovascular diseases because it is a well-known biomarker for evaluating risks of cardiovascular diseases. This study presents a dual-aptamer assay for detection of CRP by using field-effect transistors (FET). This is the first time that two aptamers, which are specific to CRP, were used to form a sandwich assay such that the CRP concentration could be detected by FET devices. Furthermore, a microfluidic system was used to automate the dual-aptamer sandwich assay such that the entire diagnosis process could be automated. In addition to electric signals from the FET device, fluorescent signals were also used to confirm this assay. Experimental results revealed that the first aptamer (1st aptamer) and the second aptamer (c aptamer) could be specifically binded with target CRP. Furthermore, the microfluidic chip integrated with FET can be re-used if the binded CRP and 2nd aptamer was eluted. Besides, in order to prevent the interference materials like proteins, cells and any nonspecific molecules from adhering onto the gate region of the FET device even after immobilization of 1st aptamer, we used ethanolamine as the blocking agent to prevent nonspecific adhesion. The experimental results confirmed that blocking using ethanolamine could successfully prevent nonspecific binding.
{"title":"Dual-aptamer assay for C-reactive protein detection by using field-effect transistors on an integrated microfluidic system","authors":"W. Kao, C. Chu, Wen-Hsin Chang, Yu-Lin Wang, Gwo-Bin Lee","doi":"10.1109/NEMS.2016.7758319","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758319","url":null,"abstract":"Rapid and accurate diagnosis of C-reactive protein (CRP) is crucial for monitoring cardiovascular diseases because it is a well-known biomarker for evaluating risks of cardiovascular diseases. This study presents a dual-aptamer assay for detection of CRP by using field-effect transistors (FET). This is the first time that two aptamers, which are specific to CRP, were used to form a sandwich assay such that the CRP concentration could be detected by FET devices. Furthermore, a microfluidic system was used to automate the dual-aptamer sandwich assay such that the entire diagnosis process could be automated. In addition to electric signals from the FET device, fluorescent signals were also used to confirm this assay. Experimental results revealed that the first aptamer (1st aptamer) and the second aptamer (c aptamer) could be specifically binded with target CRP. Furthermore, the microfluidic chip integrated with FET can be re-used if the binded CRP and 2nd aptamer was eluted. Besides, in order to prevent the interference materials like proteins, cells and any nonspecific molecules from adhering onto the gate region of the FET device even after immobilization of 1st aptamer, we used ethanolamine as the blocking agent to prevent nonspecific adhesion. The experimental results confirmed that blocking using ethanolamine could successfully prevent nonspecific binding.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"602 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116331812","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-17DOI: 10.1109/NEMS.2016.7758260
Nagarjuna Neella, V. Gaddam, K. Rajanna, M. Nayak
we are reporting the fabrication of reduced graphene oxide (RGO) - silver (Ag) nanocomposite films for temperature sensor application on the basis of negative temperature coefficient (NTC) resistive element. The nanocomposite was successfully prepared by the solution mixing of RGO nanosheets and Ag metal nanoparticles in N-Methyl-2-Pyrrolidone (NMP) using ultrasonication process. It was found that, the as-formed Ag nanoparticles were dispersed homogeneously and uniformly on the surface of the RGO nanosheets within the nanocomposite system. The as-synthesized RGO nanosheets and nanocomposite were characterized by field emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD) for their surface analysis and structural properties respectively. The fabrication of temperature sensor, the sensing film formation is carried out on the flexible kapton membrane by using drop casting method. The thickness of the sensing film is around 50 μm. It was observed that the resistivity of nanocomposite sensing film decreased with the increase of temperature resulting in NTC behavior. The measured NTC and sensitivity of the sensor were found to be -0.00187 Ω / Ω / K and 0.40472 Ω /K respectively. Therefore, the synthesized graphene- silver nanocomposite film is an attractive material for making temperature sensors. Since the output is linear with respect to temperature variation, the electronic readout circuitry will be simpler. However, the mechanism of electrical resistance change of nanocomposite films can also be used in sensing environmental parameters such as chemical, biological, moisture and mechanical for their gas, glucose, humidity and strain/pressure sensor applications respectively.
{"title":"Negative temperature coefficient behavior of graphene-silver nanocomposite films for temperature sensor applications","authors":"Nagarjuna Neella, V. Gaddam, K. Rajanna, M. Nayak","doi":"10.1109/NEMS.2016.7758260","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758260","url":null,"abstract":"we are reporting the fabrication of reduced graphene oxide (RGO) - silver (Ag) nanocomposite films for temperature sensor application on the basis of negative temperature coefficient (NTC) resistive element. The nanocomposite was successfully prepared by the solution mixing of RGO nanosheets and Ag metal nanoparticles in N-Methyl-2-Pyrrolidone (NMP) using ultrasonication process. It was found that, the as-formed Ag nanoparticles were dispersed homogeneously and uniformly on the surface of the RGO nanosheets within the nanocomposite system. The as-synthesized RGO nanosheets and nanocomposite were characterized by field emission scanning electron microscope (FE-SEM) and X-ray diffraction (XRD) for their surface analysis and structural properties respectively. The fabrication of temperature sensor, the sensing film formation is carried out on the flexible kapton membrane by using drop casting method. The thickness of the sensing film is around 50 μm. It was observed that the resistivity of nanocomposite sensing film decreased with the increase of temperature resulting in NTC behavior. The measured NTC and sensitivity of the sensor were found to be -0.00187 Ω / Ω / K and 0.40472 Ω /K respectively. Therefore, the synthesized graphene- silver nanocomposite film is an attractive material for making temperature sensors. Since the output is linear with respect to temperature variation, the electronic readout circuitry will be simpler. However, the mechanism of electrical resistance change of nanocomposite films can also be used in sensing environmental parameters such as chemical, biological, moisture and mechanical for their gas, glucose, humidity and strain/pressure sensor applications respectively.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134012126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2016-04-17DOI: 10.1109/NEMS.2016.7758228
Kui Song, Weiguan Zhang, Wei Xu, Yi-Kuen Lee
We conduct a systematic scaling analysis of the sensitivity of a silicon capacitive MEMS microphone based on a dimensionless 1-degree-of-freedom (1DOF) model considering residual stress. The theoretical normalized sensitivity we derived is a nonlinear function of normalized diaphragm size (h/a), acoustic driving frequency, 3 effective stiffness terms and the other parameters. From our 1DOF model, the optimal normalized diaphragm has to be trade-off between high sensitivity and large bandwidth. In addition, we found that a critical diaphragm radius of 415 μm for a silicon MEMS microphone, is located at the inflection point in the sensitivity function of the radius. In addition, this critical radius corresponds to the minimum effective stiffness of the microphone.
{"title":"Scaling analysis of capacitive MEMS microphones considering residual stress","authors":"Kui Song, Weiguan Zhang, Wei Xu, Yi-Kuen Lee","doi":"10.1109/NEMS.2016.7758228","DOIUrl":"https://doi.org/10.1109/NEMS.2016.7758228","url":null,"abstract":"We conduct a systematic scaling analysis of the sensitivity of a silicon capacitive MEMS microphone based on a dimensionless 1-degree-of-freedom (1DOF) model considering residual stress. The theoretical normalized sensitivity we derived is a nonlinear function of normalized diaphragm size (h/a), acoustic driving frequency, 3 effective stiffness terms and the other parameters. From our 1DOF model, the optimal normalized diaphragm has to be trade-off between high sensitivity and large bandwidth. In addition, we found that a critical diaphragm radius of 415 μm for a silicon MEMS microphone, is located at the inflection point in the sensitivity function of the radius. In addition, this critical radius corresponds to the minimum effective stiffness of the microphone.","PeriodicalId":150449,"journal":{"name":"2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122072421","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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