A self-filling low-cost membrane micropump

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659796

K.-P. Kamper, J. Dopper, W. Ehrfeld, S. Oberbeck

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引用次数: 72

Abstract

We present a new membrane micropump fabricated by micro mold injection and laser based techniques. Due to an innovative pump design featuring an extremely small internal volume and a large compression ratio the pumps are the first micropumps to combine outstanding technical performance with a really easy handling. The pumps work equally well with gases and liquids and exhibit a very reliable self-filling behavior with liquids. Pumping water we have achieved maximum pump rates of 400 /spl mu/l/min and a maximum back pressure of 2100 hPa. Using air the pumps can build up pressures of up to 500 hPa and generate a maximum flow rate of 3.5 ml/min. The maximum vacuum the pumps can create amounts to 350 hPa. Due to the use of replication based fabrication techniques and optimized assembly methods, the pump design has the potential for production costs on the order of 5 DM. The new micropump is being manufactured in a small series production and is available for industrial evaluation.

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一种自充式低成本膜微泵制造技术

介绍了一种利用微模注射和激光技术制备的新型膜微泵。由于创新的泵设计具有极小的内部体积和大压缩比的泵是第一个微型泵结合了卓越的技术性能和一个真正容易操作。该泵对气体和液体都能很好地工作，并表现出非常可靠的液体自充行为。抽水我们已经实现了400 /spl亩/升/分钟的最大泵率和2100 hPa的最大背压。使用空气泵可以建立高达500 hPa的压力，并产生3.5 ml/min的最大流量。泵能产生的最大真空达350 hPa。由于使用了基于复制的制造技术和优化的装配方法，该泵设计的生产成本可能在5 DM左右。新的微型泵正在进行小批量生产，并可用于工业评估。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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