A new basic technology for magnetic micro-actuators

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659744

E. Fullin, J. Gobet, H. Tilmans, J. Bergqvist

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引用次数: 45

Abstract

This paper presents a new technology for the fabrication of electromagnetic micro-actuators. This technology allows "U-core" electromagnets to be built on ferromagnetic substrates. The electromagnets consist of multi-level copper coils and electroplated NiFe poles. Combined with a NiFe "keeper", an electromagnetic actuator is obtained, which can generate a magnetic force up to several tens of mN. The actuator can be implemented in several applications, such as valves, motors and relays. In this paper, an electromagnetic microrelay, to be used, for instance, in the automatic test equipment (ATE) market, is described. First experimental results of the relay, using a driving coil of 127 turns and having gold contacts, have shown an on-resistance of less than 0.4 /spl Omega/ for an input (driving) current of 8 mA, corresponding to a driving power of 14 mW. These data compare favorably well with previous results of electromagnetic microrelays as presented in the literature.

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磁性微执行器的一种新的基础技术

提出了一种制造电磁微执行器的新技术。这项技术允许“u芯”电磁铁建立在铁磁性衬底上。电磁铁由多层铜线圈和镀镍铁氧体组成。结合NiFe“保持器”，得到一个电磁执行器，它可以产生高达几十mN的磁力。执行器可以在多种应用中实现，例如阀门，电机和继电器。本文以自动测试设备(ATE)市场为例，介绍了一种电磁微继电器。该继电器的第一个实验结果表明，在输入(驱动)电流为8 mA时，使用127圈驱动线圈并具有金触点，导通电阻小于0.4 /spl ω /，对应于驱动功率为14 mW。这些数据与文献中提出的电磁微继电器的先前结果相比较有利。

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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