A CMOS-Compatible WORM Memory for Low-Cost Non-Volatile Memory Applications

R. Barsatan, T. Y. Man, M. Chan
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引用次数: 2

Abstract

A Write-Once-Read-Many (WORM) memory using a CMOS-compatible Antifuse (AF) element for low-cost nonvolatile memory is presented. The AF device is formed on an NMOS with PLDD implants (MOS-channel AF) to enhance hot-carrier effects. The AF is programmed by applying a high voltage across the channel until breakdown such that it becomes resistor. The devices were fabricated in standard TSMC 0.18μm process without any process modification. The channel breakdown was observed between 4.5V to 5V. The programmed resistance is in the kΩ range at milliampere range of programming current. A 128-bit WORM architecture is presented based on an IO-select transistor and the AF memory cell. The architecture was designed and simulated in Cadence to verify the functionality of the device when formed in an array.
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用于低成本非易失性存储器应用的cmos兼容WORM存储器
提出了一种低成本非易失性存储器,采用cmos兼容的防熔丝(AF)元件的一次写多读(WORM)存储器。自动对焦装置是在带有PLDD植入物(mos通道自动对焦)的NMOS上形成的,以增强热载子效应。自动对焦是通过在通道上施加高电压来编程的,直到击穿,使其成为电阻。器件采用标准TSMC 0.18μm工艺,不做任何工艺修改。在4.5V至5V之间观察到通道击穿。编程电阻在编程电流毫安范围内为kΩ。提出了一种基于io选择晶体管和自动对焦存储器单元的128位WORM结构。该架构在Cadence中进行了设计和仿真,以验证该设备在阵列中形成时的功能。
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