Fabrication of electrochemical sensor in Low Temperature Co-fired Ceramics

Abstract

Thick film voltammetric systems for electrochemical analysis in-situ are characterized by small size, low cost and variability of a used materials [1]. A conventional alumina ceramics substrate allows a creation of only planar electrode system. Low Temperature Co-fired Ceramics (LTCC) enables to create three dimensional structure, while maintaining the similar advantageous properties of alumina ceramics, such as low surface roughness, chemical indifference, good thermal stability. This article is focused on design and fabrication of electrochemical sensor in LTCC technology. The sensor consists of two parts. A base of the sensor contains heater. The second part contains a three-electrode system for electrochemical analysis. The design of the electrodes enables to measure a small quantity of an analyte.