Self-Aligned GaAs Power Mesfet's for X-Band

P. Baudet, M. Binet, D. Boccon-Gibod, L. Hollan
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引用次数: 1

Abstract

More than 1 W att output power has been achieved at 10 GHz with GaAs MESFETs which are produced using a self-alignment technique. Principal improvements in performances are due to an increased maximum operating voltage of the Schottky diodes. This is obtained with a graded doping profile and there is in addition an improved linearity of the MESFET's. A technique of interconnection of the sources by metallic columns through the substrate has been used and a similar structure using N+ columns instead of the metal will be proposed. These techniques simplify the mounting of the transistor and reduces the parasitic inductances in series with the sources.
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用于x波段的自对准砷化镓功率介面晶体管
使用自对准技术生产的GaAs mesfet在10 GHz下实现了超过1瓦的输出功率。性能的主要改进是由于肖特基二极管的最大工作电压增加。这是通过渐变的掺杂剖面获得的,此外还有MESFET的线性度的改进。采用了金属柱通过衬底连接源的技术,并提出了用N+柱代替金属的类似结构。这些技术简化了晶体管的安装,并减少了与源串联的寄生电感。
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A New Method of Exciting Axial Slots Cut on a Circular Cylinder Improved Design Method for X-Band Microstrip FET Amplifiers without Experimental Adjustment Techniques. Microwave Frequency Digital Circuits Using GaAs Mesfet's with a Planar Self-Aligned Technology Effects Due to Microwaves in an Enzyme-Substrate System Design Limitations and Experimental Results of High Power CW PPM-Focused TWT's from 30 to 50 GHz
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