S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, H. Toshiyoshi
{"title":"A mixed-signal analysis for tilted MEMS torsion mirror devices","authors":"S. Maruyama, A. Higo, M. Nakada, K. Takahashi, T. Takahashi, M. Mita, H. Fujita, Y. Nakano, H. Toshiyoshi","doi":"10.1109/OMEMS.2010.5672161","DOIUrl":null,"url":null,"abstract":"We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672161","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.
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