{"title":"A temperature compensation subsystem for an IMEMS CMOS pressure sensor","authors":"F. Chávez, A. Olmos, C. Azeredo-Leme, E. Charry","doi":"10.1109/ASIC.1998.723056","DOIUrl":null,"url":null,"abstract":"This work presents a temperature compensation subsystem for a piezoresistive pressure microsensor system operating between 0-50 kPa for medical purposes. Different full scale span and offset voltage can be compensated easily against temperature effects with a CMOS circuit that generates two temperature dependent voltages with 64 possible settings of temperature coefficients: the drive voltage of the active bridge and the reference voltage of the offset cancellation DAC. The subsystem showed a total power dissipation of approximately 3 mW working with 3 volts of power supply.","PeriodicalId":104431,"journal":{"name":"Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Eleventh Annual IEEE International ASIC Conference (Cat. No.98TH8372)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASIC.1998.723056","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
This work presents a temperature compensation subsystem for a piezoresistive pressure microsensor system operating between 0-50 kPa for medical purposes. Different full scale span and offset voltage can be compensated easily against temperature effects with a CMOS circuit that generates two temperature dependent voltages with 64 possible settings of temperature coefficients: the drive voltage of the active bridge and the reference voltage of the offset cancellation DAC. The subsystem showed a total power dissipation of approximately 3 mW working with 3 volts of power supply.
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