M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita
{"title":"Zeolite-based thermal mass gas sensor with self-identification algorithm","authors":"M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita","doi":"10.1109/DTIP.2017.7984464","DOIUrl":null,"url":null,"abstract":"We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2017.7984464","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
