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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)最新文献

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Co-design of an adaptive hyperspectral imager based on MEMS arrays: From proof of principle to a research prototype 基于MEMS阵列的自适应高光谱成像仪的协同设计:从原理验证到研究原型
Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984470
J. Roul, F. Blanc, S. Lacroix, A. Monmayrant
We have defined a hyperspectral imager based on micro-mirror MEMS array, that features easily adaptable spectral resolution, adjustable acquisition time, and high spatial resolution independent of spectral resolution. We present the development of an integrated research prototype of the imager, that allows the control of both the micro-mirrors array and CMOS data reading from the same FPGA board, so as to allow the definition of acquisition schemes adapted to the scene in real time.
我们设计了一种基于微镜MEMS阵列的高光谱成像仪,具有光谱分辨率适应性强、采集时间可调、与光谱分辨率无关的高空间分辨率等特点。我们提出了一个集成研究原型的成像仪的发展,它允许控制微镜阵列和CMOS数据读取从同一个FPGA板,从而允许定义实时采集方案适应的场景。
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引用次数: 1
Zeolite-based thermal mass gas sensor with self-identification algorithm 基于自识别算法的沸石热质量气体传感器
Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984464
M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita
We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.
提出了一种基于热质量提取和识别算法的新型热气体传感器工作模式。该体系是一种覆盖沸石的硅微观结构,在恒温下通过热伪随机序列刺激运行。在常温常压条件下,通过亲水的fu型沸石涂层对气体水分子的检测,验证了所提出的检测原理。
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引用次数: 1
Chemical gas sensor based on a novel capacitive microwave flexible transducer and composite polymer carbon nanomaterials 基于新型电容式微波柔性换能器和复合高分子碳纳米材料的化学气体传感器
Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984509
P. Bahoumina, H. Hallil, J. Lachaud, D. Rebière, C. Dejous, A. Abdelghani, K. Frigui, S. Bila, D. Baillargeat, Q. Zhang, P. Coquet, C. Paragua, E. Pichonat, H. Happy
This study presents the results on the feasibility of a resonant planar chemical capacitive sensor in the microwave frequency range suitable for gas detection and for wireless communications applications. The objective is to develop a low cost ultra-sensitive sensor that can be integrated into a real time multi-sensing platform. The first demonstrators target the detection of harmful gases such as volatile organic compounds (VOCs) to monitor environmental pollution.
本研究提出了一种适用于气体检测和无线通信应用的微波频率范围内的谐振平面化学电容传感器的可行性。目标是开发一种低成本的超灵敏传感器,可以集成到实时多传感平台中。首批示范装置的目标是检测挥发性有机化合物(VOCs)等有害气体,以监测环境污染。
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引用次数: 12
Design of micro-fabricated thermal flow-rate sensor for water network monitoring 用于水网监测的微加工热流量传感器设计
Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984474
Ferdous Shaun, Hugo Regina, F. Marty, E. Nefzaoui, T. Bourouina, W. Cesar
We report on micro-machined flow-rate sensors as part of autonomous multi-parameter sensing devices for water network monitoring. Three different versions of the flow-rate sensors have been designed, fabricated and experimentally characterized. Those sensors are made of identical micrometric platinum resistors deposited on two different substrates-glass and silicon with and without insulation layer. The sensors were tested under the anemometric operating scheme. They were characterized under a water velocity range from 0 to 3.68 m/s. We highlight the fact that the glass substrate device is more sensitive and less power-consuming than the silicon one under the identical operating condition, which requires further design strategies when using silicon as the substrate material. Experimental results are analyzed with respect to CFD simulations with the Finite Element Method.
我们报告了微机械流量传感器作为自主多参数传感装置的一部分,用于水网监测。设计、制作了三种不同版本的流量传感器,并对其进行了实验表征。这些传感器是由相同的微米级铂电阻制成的,它们被放置在两种不同的基板上——有和没有绝缘层的玻璃和硅。在风速操作方案下对传感器进行了测试。它们在0 ~ 3.68 m/s的流速范围内进行了表征。我们强调,在相同的工作条件下,玻璃基板器件比硅基板器件更敏感,功耗更低,这需要在使用硅基板材料时进一步设计策略。用有限元方法对实验结果进行了CFD模拟分析。
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引用次数: 7
A low cost patternable packaging technology for biosensors 一种用于生物传感器的低成本可模式化包装技术
Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984493
A. Buchoux, E. Blair, A. Tsiamis, J. Marland, Stewart Smith
This paper demonstrates a simple and low cost technology to reliably and accurately package integrated chips. Microchannels and cavities of minimum feature size of 500 μm can be reliably reproduced. In addition, the curing depth in relation to the exposure time was investigated. A simple microfluidic device, consisting of a 500 μm channel and 2 mm ports, was manufactured to demonstrate the possibilities of this technology. Extensive electrochemical experiments showed that the packaging material is a good insulator and leaves no residue on the chip.
本文介绍了一种简单、低成本的集成芯片可靠、精确封装技术。可以可靠地再现最小特征尺寸为500 μm的微通道和空腔。此外,还研究了固化深度与曝光时间的关系。制造了一个简单的微流体装置,由500 μm通道和2 mm端口组成,以演示该技术的可能性。大量的电化学实验表明,该封装材料是一种良好的绝缘体,在芯片上没有残留物。
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引用次数: 1
Synthesis and characterization of the interaction of ZnO and CdTe photoluminescent quantum dots for photovoltaic applications 用于光伏应用的ZnO和CdTe光致发光量子点的合成和相互作用的表征
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984498
F. Orona-Magallanes, R. Guerrero-Gonzalez, A. Zazueta-Raynaud, A. Ayón, J. E. Pelayo, R. Ruelas, E. Saucedo-Flores
We discuss the synthesis of zinc oxide (ZnO) and cadmium telluride (CdTe) quantum dots (QDs), the characterization of their optical properties on their own as well as combined, and their influence on the power conversion efficiency of photovoltaic structures when the QD blends were dispersed in a polymeric solution and deployed on the window surface of polycrystalline Si solar cells as down-shifting photoluminescent (PL) coatings. Upon the incorporation of increasing amounts of ZnO QDs into a colloidal solution of CdTe, the characteristic CdTe PL peak location was monotonically red-shifted from 598 nm to 611 nm. A 1:3 volumetric combination CdTe:ZnO QDs exhibited a the power conversion efficiency increase from 14.71% for an uncoated solar cell to 15.02% with the QD layer, that is, an approximate improvement of approximately 2%.
我们讨论了氧化锌(ZnO)和碲化镉(CdTe)量子点(QDs)的合成,它们各自和组合的光学性质的表征,以及当QD共混物分散在聚合物溶液中并作为下移光致发光(PL)涂层部署在多晶硅太阳能电池的窗口表面时,它们对光伏结构的功率转换效率的影响。在CdTe胶体溶液中加入越来越多的ZnO量子点后,CdTe的特征PL峰位置从598 nm单调红移到611 nm。在体积为1:3的CdTe:ZnO量子点组合中,太阳能电池的功率转换效率从未涂覆的14.71%提高到有量子点层的15.02%,大约提高了2%。
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引用次数: 0
Waste-aware fluid volume assignment for flow-based microfluidic biochips 基于流动的微流体生物芯片的废物感知流体体积分配
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984507
Alexander Schneider, P. Pop, J. Madsen
Microfluidic biochips are replacing the conventional biochemical analysers integrating the necessary functions onchip. We are interested in Flow-Based Microfluidic Biochips (FBMB), where a continuous flow of liquid is manipulated using integrated microvalves. Using microvalves and channels, more complex Fluidic Units (FUs) such as switches, micropumps, mixers and separators can be constructed. When running a biochemical application on a FBMB, fluid volumes are dispensed from input reservoirs and used by the FUs. Given a biochemical application and a biochip, we are interested in determining the fluid volume assignment for each operation of the application, such that the FUs volume requirements are satisfied, while over- and underflow are avoided and the total volume of fluid used is minimized. We propose an algorithm for this fluid assignment problem. Compared to previous work, our method is able to minimize the fluid consumption through optimal fluid assignment and reuse of fluid waste. Due to the algorithm's low complexity, fluid requirements can also be calculated during runtime for error recovery or statically unknown cases.
微流控生物芯片正在取代传统的生化分析仪,将必要的功能集成在芯片上。我们对基于流动的微流体生物芯片(FBMB)感兴趣,其中使用集成微阀控制连续的液体流动。使用微阀和通道,可以构建更复杂的流体单元(FUs),如开关,微泵,混合器和分离器。当在FBMB上运行生化应用程序时,流体体积从输入储层中分配给FUs使用。考虑到生化应用和生物芯片,我们感兴趣的是确定应用中每个操作的流体体积分配,从而满足FUs体积要求,同时避免过流和下流,并最大限度地减少所用流体的总量。我们提出了一种求解该流体分配问题的算法。与以前的工作相比,我们的方法能够通过优化流体分配和再利用流体废物来最大限度地减少流体消耗。由于算法的低复杂度,流体需求也可以在运行时计算错误恢复或静态未知情况。
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引用次数: 3
Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement 基于三孔梳状驱动机构的大功率大排量能量采集器的设计与制造
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984479
H. Honma, H. Fujita, H. Toshiyoshi, H. Mitsuya, H. Ashizawa, G. Hashiguchi
This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209 μm was confirmed by using a high-speed camera.
提出了一种基于三端口静电梳状驱动机构的大功率能量收集装置。采用对称电极结构来减小束缚静电力,从而允许在低加速度下振荡质量的大位移。当加速度为0.27 G,频率为125 Hz时,得到的输出功率为150.3 μW,其中机械行程大于209 μW。
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引用次数: 0
Reconfigurable behavior of CdTe quantum dots at terahertz frequencies employing UV excitation 紫外激发下太赫兹CdTe量子点的可重构行为
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984494
Clarissa D. Vázquez-Colón, Juan Adrián Zepeda- Galvez, A. Ayón, D. Shreiber
We report the synthesis and characterization of cadmium-telluride (CdTe) quantum dots (QDs) and their performance at Terahertz frequencies employing THz time-domain spectroscopy (THZ-TDS). The data was analyzed using a combination of Fast Fourier Transform (FFT) and effective medium theory to obtain the optical characteristics of the aforementioned CdTe QDs. Additionally, we performed similar measurements while exposing the QDs to a UV excitation with a wavelength of 302 nm and observed a noticeable variation in both the real and imaginary components in the index of refraction that could prove crucial in the demonstration of reconfigurable devices operating in the THz regime.
我们报道了碲化镉(CdTe)量子点(QDs)的合成和表征及其在太赫兹频率下的性能。利用快速傅里叶变换(FFT)和有效介质理论对数据进行分析,得到了上述CdTe量子点的光学特性。此外,我们在将量子点暴露于波长为302 nm的紫外激发下进行了类似的测量,并观察到折射率的实分量和虚分量的明显变化,这对于在太赫兹波段下操作的可重构器件的演示至关重要。
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引用次数: 1
PLL-FITC fluorescence thermography on dry surfaces 干燥表面的PLL-FITC荧光热成像
Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984505
B. Charlot, R. Desgarceaux, A. Giani, F. Bardin
Fluorescence thermography[1] uses the property of fluorescent dyes to lower their fluorescence emission intensity with the temperature. By using a diblock molecule, Poly-L-Lysine grafted with Fluorescein isothiocyanate (FITC), it is possible to coat a surface with a thin layer of fluorescent dye and to use temperature variations of the fluorophore to measure a temperature map at small scale on a dry surface. By using Indium Tin Oxide as transparent conductor, we can observe with this non-perturbative technique the temperature increase inside a micro dissipator.
荧光热成像技术[1]利用荧光染料的特性,使其荧光发射强度随温度的升高而降低。通过使用二嵌段分子聚l -赖氨酸接枝异硫氰酸荧光素(FITC),可以在表面涂上一层薄薄的荧光染料,并利用荧光团的温度变化来测量干燥表面上的小尺度温度图。用氧化铟锡作为透明导体,我们可以用这种无微扰技术观察微耗散管内的温度升高。
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引用次数: 1
期刊
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
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