Broadband On-Wafer Calibrations Comparison for Accuracy and Repeatability on Co-Planar Waveguide Structures

Abstract

This paper compares four popular on-wafer calibration methods including multiline TRL, LRRM, LRM, and SOLT, based on three diverse coplanar waveguide circuits. The results show that the Multiline TRL provides the highest accuracy and repeatability for all of the circuits up to 40 GHz.