Coupling of length scales in MEMS modeling: the atomic limit of finite elements

R. Rudd
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引用次数: 3

Abstract

We discuss concurrent multiscale simulations of the dynamic and temperature-dependent behavior of sub-micron MEMS, especially micro-resonators. The coupling of length scales methodology we have developed employs an atomistic description of small but key regions of the device, consisting of millions of atoms, coupled concurrently to a finite element model of the periphery. This novel technique accurately models the behavior of the mechanical components of MEMS down to the atomic scales. This paper addresses general issues involved in this kind of multiscale simulation, with a particular emphasis on how finite elements can be extended to ensure a reliable model as the mesh spacing is refined to the atomic scale. We discuss how the coupling of length scales technique has been sued to identify atomistic effects in sub-micron resonators.
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MEMS建模中长度尺度的耦合:有限元的原子极限
我们讨论了亚微米MEMS,特别是微谐振器的动态和温度依赖行为的并行多尺度模拟。我们开发的长度尺度耦合方法采用了对设备的小但关键区域的原子描述,由数百万个原子组成,同时耦合到外围的有限元模型。这项新技术精确地模拟了MEMS机械元件的行为,精确到原子尺度。本文讨论了涉及这种多尺度模拟的一般问题,特别强调了如何扩展有限元,以确保在网格间距细化到原子尺度时建立可靠的模型。我们讨论了如何利用长度尺度耦合技术来识别亚微米谐振腔中的原子效应。
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