Investigation of diode triggered silicon control rectifier turn-on time during ESD events

Ahmed Y. Ginawi, R. Gauthier, T. Xia
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Abstract

Diode-triggered silicon-controlled rectifier (DT-SCR) devices protect sensitive circuit nodes, such as high-frequency analog circuits and thin-gate complementary metal-oxide semiconductor (CMOS) circuits with high-speed input [1]. Reducing the turn-on time and overshoot voltage enhances the use of a DTSCR device in high-speed applications. We analyze the two lateral bipolar devices found in CMOS based process SCRS to improve the overall DTSCR turn-on time during an electrostatic discharge (ESD) event. We use technology computer-aided design (TCAD) device-level simulations to accurately predict the turn-on time of these parasitic bipolar devices in a 32nm CMOS technology.
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ESD事件中二极管触发硅控整流器导通时间的研究
二极管触发的可控硅(DT-SCR)器件保护敏感的电路节点,如高频模拟电路和具有高速输入的薄栅互补金属氧化物半导体(CMOS)电路[1]。减少导通时间和过调电压提高了DTSCR器件在高速应用中的使用。我们分析了在基于CMOS的工艺SCRS中发现的两个侧双极器件,以提高静电放电(ESD)事件中DTSCR的整体导通时间。我们使用计算机辅助设计(TCAD)器件级模拟技术来准确预测这些寄生双极器件在32nm CMOS技术中的导通时间。
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