A dry migration? Copper dendrite growth in adhesive tape during burn-in

S. Tan, S. H. Ong
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引用次数: 7

Abstract

Copper migration which exhibits dendrite short-circuits in conductor-insulator-conductor structures may result in failure and reliability problems in microcircuits. Earlier works (Harsanyi, 1995; Adema et al., 1990 and 1993; Rudra and Jennings, 1994; Nieman, 1994; Harsanyi, 1999) have shown this mechanism in moist conditions. This is known as wet migration. In this investigation, we have observed copper dendrite growth during burn-in stress in adhesive tape which was used for leadframes to maintain the coplanarity and stability of individual lead pins during semiconductor manufacturing. A special parallel lapping technique revealed the dendrite growth under the tape. It is believed that chemical interaction has taken place, especially due to polyamic acid, which apparently reacts with copper. Further evaluations with higher temperature and voltage simulation confirm this mechanism.
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干迁移?胶带灼烧过程中铜枝晶的生长
铜迁移在导体-绝缘体-导体结构中表现为枝晶短路,可能导致微电路的失效和可靠性问题。早期作品(Harsanyi, 1995;Adema等,1990年和1993年;Rudra and Jennings, 1994;尼曼,1994;Harsanyi, 1999)在潮湿条件下显示了这种机制。这就是所谓的湿迁移。在这项研究中,我们观察到在半导体制造过程中,用于引线架的胶带在烧蚀应力下铜枝晶的生长,以保持单个引脚的共面性和稳定性。一种特殊的平行研磨技术揭示了带子下的枝晶生长。人们认为发生了化学相互作用,特别是由于聚酰胺酸,它显然与铜发生了反应。在更高的温度和电压下进行的进一步评估证实了这一机制。
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