Modeling and Experiments of Input-Output Displacement Relations for a Piezoelectric Nanopositioner

Lin Wu, Qiao Sun
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Abstract

Existing commercially available long range piezoelectric actuators have limited load carrying capacity due to the fact that frictions are used as the load bearing mechanism. In order to improve the load carry capacity for long range piezoelectric actuators with nanometer resolutions, a novel design that employs the self-lock concept has been reported. In this paper, we study the input-output displacement relations for this new design. In particular, we investigate the losses of the actuator displacement due to elastic deformations when a large force is applied. For a given load, a minimum value exists for the stroke command to ensure a non-zero output displacement. A positioning strategy was proposed to achieve a nanometer scale positioning process in a long distance. Experimental results were also given to support the analysis.
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压电纳米逆变器输入-输出位移关系的建模与实验
由于使用摩擦作为承载机制,现有的商用远程压电致动器承载能力有限。为了提高纳米分辨率的远程压电致动器的承载能力,提出了一种采用自锁概念的新型设计。在本文中,我们研究了这种新设计的输入-输出位移关系。特别地,我们研究了当施加较大的力时,由于弹性变形而造成的致动器位移损失。对于给定负载,冲程命令存在一个最小值,以确保输出位移不为零。为实现纳米尺度的远距离定位,提出了一种定位策略。实验结果也支持了分析。
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