P. Szyszka, Jakub Jendryka, Jan Sobków, Michał Zychla, M. Białas, P. Knapkiewicz, J. Dziuban, T. Grzebyk
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引用次数: 0
Abstract
This paper presents a novel approach to the development of a MEMS-based Quadrupole Mass Spectrometer. The instrument consists of a 3D-printed, compact chip-like package containing MEMS components required to perform the gas analysis. Obtained mass range between 1 and 150 u and a resolution of 45, makes it ideal for a range of applications which does not require high-end performance. Our work demonstrates that MEMS technology in conjunction with novel 3Dp fabrication techniques offers a feasible route to developing compact mass spectrometers, providing an opportunity for researchers to create portable, yet potent instruments for a range of applications, opening new possibilities for on-site, real-time analysis in many different fields.
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