{"title":"Two dimensional curve shape primitives for detecting line defects in silicon wafers","authors":"D. Sikka","doi":"10.1109/IJCNN.1992.227110","DOIUrl":null,"url":null,"abstract":"A new set of two-dimensional curve shape primitives for detecting line defects on wafers in semiconductor manufacturing is presented. A supervised learning based neural network which incorporates these shape primitives has been built and tested on more than six months of real data from an Intel fabrication laboratory. Results demonstrate that the new set of shape primitives was very accurate in capturing the line defects.<<ETX>>","PeriodicalId":286849,"journal":{"name":"[Proceedings 1992] IJCNN International Joint Conference on Neural Networks","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"[Proceedings 1992] IJCNN International Joint Conference on Neural Networks","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IJCNN.1992.227110","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
A new set of two-dimensional curve shape primitives for detecting line defects on wafers in semiconductor manufacturing is presented. A supervised learning based neural network which incorporates these shape primitives has been built and tested on more than six months of real data from an Intel fabrication laboratory. Results demonstrate that the new set of shape primitives was very accurate in capturing the line defects.<>
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
![[Proceedings 1992] IJCNN International Joint Conference on Neural Networks](/Content/css/sci/img/zetp.jpg)
求助内容：
应助结果提醒方式：
扫码关注我们
