N. Yoshioka, A. Heya, Naoto Matuo, Yousuke Nakamura, Gakuhiko Yokomori, M. Yoshioka, K. Kohama, Kazuhiro Ito
{"title":"Formation of nc-Si in SiOx by flash lamp anneling","authors":"N. Yoshioka, A. Heya, Naoto Matuo, Yousuke Nakamura, Gakuhiko Yokomori, M. Yoshioka, K. Kohama, Kazuhiro Ito","doi":"10.1109/AM-FPD.2016.7543661","DOIUrl":null,"url":null,"abstract":"The formation of nanocrystal silicon (nc-Si) in SiOx is one of the key technologies for the realization of high-quality solar cells. The SiOx films were deposited on a quartz substrate by a reactive sputtering. The Si/O ratio of the SiOx films were changed from 0.56 to 2.07. The nc-Si in SiOx film was characterized by Raman scattering spectroscopy. The Crystalline fractions of all samples after FLA were almost 100%. The size of nc-Si was estimated to 9 nm by Raman peak position. It is shown that the grain size of nc-Si was not changed by the Si/O ratio. On the other hand, the full width at half maximum (FWHM) of Raman peak due to crystal phase was changed by the Si/O ratio of SiOx film.","PeriodicalId":422453,"journal":{"name":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 23rd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AM-FPD.2016.7543661","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The formation of nanocrystal silicon (nc-Si) in SiOx is one of the key technologies for the realization of high-quality solar cells. The SiOx films were deposited on a quartz substrate by a reactive sputtering. The Si/O ratio of the SiOx films were changed from 0.56 to 2.07. The nc-Si in SiOx film was characterized by Raman scattering spectroscopy. The Crystalline fractions of all samples after FLA were almost 100%. The size of nc-Si was estimated to 9 nm by Raman peak position. It is shown that the grain size of nc-Si was not changed by the Si/O ratio. On the other hand, the full width at half maximum (FWHM) of Raman peak due to crystal phase was changed by the Si/O ratio of SiOx film.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
