Dynamic Sensor Arrays Based on Solution-Processed Metal Oxide Semiconductor Thin-Film Transistors

Abstract

Flexible active-matrix sensor arrays provide large area and high spatial resolution for emerging sensing applications in electronic skin, health monitoring, and human-machine interfaces. However, it is still a challenge to achieve flexible active-matrix sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics. Here, we demonstrate a low-cost, high-resolution flexible sensor array by integrating solution-processed indium oxide (In2O3) transistor array with stimuli-sensitive (force, light, etc.) layers. This strategy provides an effective and universal solution to achieve large-area, active-matrix sensor arrays for future soft electronics applications.