Vacuum microelectronic electron emitter by InP double barrier diode toward RF application

Y. Miyamoto, M. Kurita, K. Furuya
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Abstract

In this paper, the possibility of high-speed vacuum microelectronic devices is discussed. As a field emitter is limited by the charging time, an electron emitter using the internal field in a semiconductor has been proposed. With a view toward the development of a semiconductor electron emitter, preliminary results for an InP double barrier emitter are presented. The observed efficiency was about 10/sup -3/ without surface treatment.
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用InP双势垒二极管制造的真空微电子电子发射器在射频中的应用
本文讨论了高速真空微电子器件的可能性。针对场发射体受充电时间限制的问题,提出了一种利用半导体内部场的电子发射体。针对半导体电子发射体的发展,给出了InP双势垒发射体的初步研究结果。未进行表面处理的效率约为10/sup -3/。
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